SmCo micromolding in an aqueous electrolyte

Chouarbi, K.; Woytasik, Marion; Lefeuvre, Élie; Moulin, Johan

doi:10.1007/s00542-013-1806-z

Cited by 11 publications

(8 citation statements)

References 20 publications

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“…Composition and deposition rate.-Former studies in a Hull cell, using a copper cathode, allowed validating the process and the electrolytic solutions. 13,14 The size of the deposit was 10 cm × 1.5 cm, after covering a part of the cathode with photoresist. The influence of the elaboration parameters on the film composition has been roughly defined.…”

Section: Resultsmentioning

confidence: 99%

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Sm-Co Thick Films Micromolding

Moulin

Woytasik

Belghiti

et al. 2013

J. Electrochem. Soc.

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This paper presents a study of the scale effect occurring during electrodeposition in the (micro)molding process of a rare earth -transition metal alloy : SmCo. Different cathode sizes have been implemented in the electrodeposition set up: a large strip (10 cm × 1.5 cm), a matrix of 1 mm 2 square and matrix of 5-50 μm micropatterns. Results concerning composition, deposition rate, adherence and thickness uniformity of the patterns show an influence of the scale effect: the decreasing of the conductive surface of the cathode leads to thinner films containing less samarium, but also a lower oxygen content. Patterns are then free of cracks, more uniform in thickness and present a good adherence to the copper seed layer. The influence of the deposition time has been also studied for micromoulding process, showing an increase of the samarium content but a decrease of the deposition rate during the deposition.

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Section: Resultsmentioning

confidence: 99%

“…The process related to deposition in a Hull cell has been detailed in previous works. 13,14 Concerning micromolding, the films were electrodeposited through photoresist molds on a Cu (100 nm)/Cr (10 nm) seed layer sputtered on a SiO 2 (100 nm)/Si substrate. The molds were realized by UV photolithography using a 20 μm thick AZ4562 photoresist.…”

Section: Methodsmentioning

confidence: 99%

Sm-Co Thick Films Micromolding

Moulin

Woytasik

Belghiti

et al. 2013

J. Electrochem. Soc.

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“…This is very often lost due to the polycrystalline nature of compounds deposited with this method. A number of groups have attempted a similar research effort elsewhere and examined different candidates, including compounds such as NdFeB and SmCo, which can provide coercive fields above 10kG and higher in its bulk form [18], [19]. However, to date there is still no compelling results demonstrating similar performance from equivalent materials produced by electrodeposition.…”

Section: Electrodepositionmentioning

confidence: 99%

Advanced Processing of Micropatterned Elasto-Magnetic Membranes

et al. 2019

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We report on a fabrication of a highly structured elasto-magnetic membrane with microscopic unit cells using lithographic techniques and electrodeposition. The membrane comprises of micro-magnets of CoNiP and Co connected via an elastic PDMS network with an area spanning 12 mm 2. Ellipsoidal CoNiP and circular Co particles were produced by electrodeposition to achieve diameters of 30 μm (major) and 10 μm (minor), and 10 μm respectively, with a thickness in the range of 6-10 μm. The electrodeposition parameters have been optimized on deposition of CoNiP films to produce an in-plane coercivity for CoNiP elements of 435 Oe. The mechanical properties of the elasto-magnetic membrane were confirmed on application of an alternating magnetic field. The proposed methodology offers a new way for fabrication of novel microfluidic and MEMs devices.

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“…In recent years, micro fabrication technology of micro permanent magnet has been studied [16][17][18][19], it has been reported that magnetic bearings composed of permanent magnets are used in MEMS actuators [20][21][22]. Compared with mechanical guide, magnetic guide has the advantages of non-contact and adjustable stiffness, and has broad application in the field of magnetic actuator [23,24].…”

Section: Introductionmentioning

confidence: 99%

A long-stroke planar linear actuator equipped with magnetic guide

Liu

Li²,

Qu³

et al. 2022

J. Micromech. Microeng.

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This paper introduces the design, fabrication and characterization of a micro electromagnetic linear actuator integrated with magnetic guide. The actuator consists of a slider, a stator and a magnetic guide. A magnetic guide is used to replace the mechanical rail of conventional linear actuator to ensure the linear motion and to avoid friction. The purpose of this paper is to study the influence of magnetic guide on the dynamic characteristics of electromagnetic linear actuator and measuring techniques for micro-actuators. To test the resistance to motion and output thrust force of the actuator, a cantilever type force sensor is proposed, which can measure the small force in ~mN order, and the measurement error is less than 3%. Using this sensor, the output thrust measured is higher than 10mN when 1A current is applied, and the friction force of the actuator measured is about 7.73mN. Two-phase square wave and sine wave current are used to drive the actuator, the minimum driving current and frequency of the actuator are less than 0.1A and 1Hz respectively. The actuator attains a maximum stable moving speed of 0.15m/s with the input signal frequency of below 250Hz. In addition, the anti-interference capability of the actuator is evaluated through simulations and experiments. These results show that the actuator can bear an interference 45 times its own gravity in the directions that are perpendicular to the moving freedom, and can adjust the direction of motion automatically when the rotation angle in three orthogonal directions is less than 6 °.

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SmCo micromolding in an aqueous electrolyte

Cited by 11 publications

References 20 publications

Sm-Co Thick Films Micromolding

Sm-Co Thick Films Micromolding

Advanced Processing of Micropatterned Elasto-Magnetic Membranes

A long-stroke planar linear actuator equipped with magnetic guide

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