Slot antenna‐coupled thin‐film warm carrier far‐infrared radiation detectors

Abstract

SUMMARYSlot antenna-coupled thin-film warm carrier devices were fabricated, and the detection properties were investigated at 94 and 700 GHz. Two-dimensional 8 × 3 slot antenna arrays fed by a coplanar waveguide were used as the antennas. The thin-film antennas were fabricated with a photolithographic method, and the warm carrier detectors, which have a contact area of 8 × 10 -10 cm 2 , were fabricated with an electron beam lithographic method. The experimental results indicate that the fabricated devices receive the far-infrared radiation with antenna and rectified it with nonlinear I-V characteristic. By changing the antenna from the single-slot antenna to the two-dimensional 8 × 3 slot antenna array, the detected sensitivity improved by 11 dB.