“…Although nanowires are most commonly grown via vapor–liquid–solid process, , pseudo-1D nanorods have been synthesized using a variety of vapor phase deposition methods including magnetron sputter deposition. − A variant of this approach, termed magnetron sputter epitaxy, has been used extensively by Birch and co-workers, notably for the growth of semiconducting GaN and related alloy nanorods . Gall and co-workers utilized a combination of geometric shadowing, induced by glancing angle deposition, and kinetic roughening during sputter-deposition to grow transition-metal (TM) nitride nanopipes, nanocolumns, and nanopillars. − Here, we show that kinetic limitations, inherent to magnetron sputter-deposition, can lead to self-organized growth of 111-oriented nanorods of rocksalt (B1) structured nitride, (VNbTaMoW)N, of a refractory high-entropy alloy (HEA), VNbTaMoW, with body-centered cubic structure. , …”