Size-dependent piezoelectricity of molybdenum disulfide (MoS2) films obtained by atomic layer deposition (ALD)

Huang, Yazhou; Liu, Lei; Sha, Jingjie; Chen, Yunfei

doi:10.1063/1.4998447

Cited by 19 publications

(11 citation statements)

References 22 publications

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“…FET [176] 500-900 1−3 ML films (80-100 nm) FET, p-n diode photodetector [177] [ 178] 375-475 (600-900, S or H 2 S) a few ML films (cryst.) - [179] 450 1−3 ML flakes (≈100 nm) 4−10 ML films (≈100 nm) - [180] 420-490 10−50 nm films (20-100 nm) -2017 [181] 390-480 20−60 nm films (30-120 nm) Piezoelectric [182] 460 2.5−45 nm films (10-15 nm) Lubricant [183] 450 1-8 ML films (≈15 nm) Lubricant [184] 430-480 1-10 ML films (cryst.) Lubricant [185] 460 1-5 ML films (≈30-100 nm) Lubricant [186] ?…”

Section: Atomic Layer Deposition Processes For 2d Metal Dichalcogenidesmentioning

confidence: 99%

“…Besides electronics, catalysis, and energy storage applications, ALD TMDCs have been studied as lubricating [28,182,[185][186][187]259,367] and plasmonic/photonic coatings [215,248,295] as well as an as absorber [254] and counter electrode [217] in solar cells. Depending on the application, very different thicknesses from a few ML to hundreds of nanometers have been used (Figure 17a).…”

Section: Other Applicationsmentioning

confidence: 99%

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Atomic Layer Deposition of 2D Metal Dichalcogenides for Electronics, Catalysis, Energy Storage, and Beyond

Mattinen

Leskelä

Ritala

2021

Adv Materials Inter

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it was soon replaced by other materials. Research on the fundamental properties and preparation of TMDC monolayers in solution (1986), [8] on single-crystal substrates in ultrahigh vacuum (2001), [9] and in an accessible way using mechanical exfoliation [10] (2005) followed. It was the discovery of graphene in 2004 [11] with its ever expanding list of unique and exciting properties, phenomena, and potential applications [12] that amassed broad attention to 2D materials and resulted in the 2010 Nobel Prize in Physics awarded to Andre Geim and Konstantin Novoselov. Tremendous efforts have been put toward synthesis and applications of graphene, including the billion euro Graphene Flagship project funded by the European Union. [13,14] Graphene is a semimetal, however, and the need to have semiconducting materials for many crucial applications, in particular in electronics, has led researchers to search for other 2D materials. The scientific community turned to TMDCs following breakthroughs in observation of unique thickness-dependent properties, [15,16] monolayer synthesis using chemical vapor deposition (CVD), [17,18] and demonstration of high-performance semiconductor devices [19-21] in 2010-2013 (Figure 1). Indeed, in 2013 the number of scientific publications on TMDCs, in particular MoS 2 , nearly tripled over 2012, and the strong growth has continued to date, fueled by advances in synthesis, new devices, and exciting physical phenomena. The explosive growth in MoS 2 research has also expanded to other TMDCs, [22] resulting in yet new phenomena and potential applications being found. [23-26] It is now clear that TMDCs are remarkable in many ways. Their layered crystal structure gives rise to fundamental physics not seen in 3D materials, which enables novel devices and applications. [25,26,32,34-36] The layered structure also gives TMDCs their highly anisotropic properties, extremely high specific surface areas, possibility to intercalate different species between the layers, and stability as ultrathin sheets down to three atomic layers thick. The TMDC family contains dozens of different materials from semiconductors to semimetals, metals, and even superconductors. [5,22,25,34] However, TMDC research is still mostly in the early discovery stages and the investigations of TMDCs largely continue using flakes produced by mechanical exfoliation of bulk crystals. [10,26] Unfortunately, this method cannot be scaled up for practical 2D transition metal dichalcogenides (TMDCs) are among the most exciting materials of today. Their layered crystal structures result in unique and useful electronic, optical, catalytic, and quantum properties. To realize the technological potential of TMDCs, methods depositing uniform films of controlled thickness at low temperatures in a highly controllable, scalable, and repeatable manner are needed. Atomic layer deposition (ALD) is a chemical gas-phase thin film deposition method capable of meeting these challenges. In this review, the applications evaluated for ALD TMDCs are systematically...

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Section: Atomic Layer Deposition Processes For 2d Metal Dichalcogenidesmentioning

confidence: 99%

Section: Other Applicationsmentioning

confidence: 99%

Atomic Layer Deposition of 2D Metal Dichalcogenides for Electronics, Catalysis, Energy Storage, and Beyond

Mattinen

Leskelä

Ritala

2021

Adv Materials Inter

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“…From the plot of piezoresponse amplitude versus V bias , taken on the MoS 2 layers (figure 3(e)), we extracted the effective piezoelectric coefficient value (d 33 ) to be 9.6 pm V −1 . Due to the small-scale effect, the classical piezoelectricity caused by the non-centrosymmetric crystal structure will not be dominant in our case [25]. To confirm that this response was not coming only because of the classical piezoelectricity of MoS 2 in odd number of layers, the piezo response of MoS 2 having different thicknesses (monolayer, bilayer, and trilayer) was investigated by PFM under similar imaging parameters.…”

Section: Resultsmentioning

confidence: 82%

Defects-assisted piezoelectric response in liquid exfoliated MoS₂ nanosheets

Shakya¹,

Gayathri²,

Ghosh³

2021

Nanotechnology

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MoS2 is an intrinsic piezoelectric material which offers applications such as energy harvesting, sensors, actuators, flexible electronics, energy storage and more. Surprisingly, there are not any suitable, yet economical methods that can produce quality nanosheets of MoS2 in large quantities, hence limiting the possibility of commercialisation of its applications. Here, we demonstrate controlled synthesis of highly crystalline MoS2 nanosheets via liquid phase exfoliation of bulk MoS2, following which we report piezoelectric response from the exfoliated nanosheets. The method of piezo force microscopy was employed to explore the piezo response in mono, bi, tri and multilayers of MoS2 nanosheets. The effective piezoelectric coefficient of MoS2 varies from 9.6 to 25.14 pm V−1. We attribute piezoelectric response in MoS2 nanosheets to the defects formed in it during the synthesis procedure. The presence of defects is confirmed by x-ray photoelectron spectroscopy.

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“…Since MoCl 5 and H 2 S as precursors opened the prelude of ALD of MoS 2 in 2014 [29], how to produce the high quality MoS 2 film by ALD has become a hot spot. On the one hand, the two precursors, MoCl 5 and H 2 S are still used, and the film quality is improved by optimizing the process parameters [33,36,[39][40][41]. On the other hand, the new precursors are tested [30,31,37,38,[42][43][44][45][46][47].…”

Section: Precursors and Qualities Of Mos 2 Films Obtained By Aldmentioning

confidence: 99%

“…Our group has been able to obtain monolayer MoS 2 directly by ALD, and the thickness of MoS 2 can be locally controlled layer by layer [36,39,40]. In this review, both the research progress in ALD of MoS 2 and the application prospect of the obtained MoS 2 as an electrochemical catalysator are shown.…”

Section: Introductionmentioning

confidence: 99%

Recent progress in atomic layer deposition of molybdenum disulfide: a mini review

Huang

Liu

2019

Sci. China Mater.

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As a kind of specially modified chemical vapor deposition (CVD), atomic layer deposition (ALD) has long been used to fabricate thin films. The self-limiting reaction of ALD endows the films with excellent uniformity and precise controllability. The thickness of the films obtained by ALD can be controlled in an atomic scale (0.1 nm) on a large-area substrate even with complex structures. Therefore, it has recently been employed to produce the two-dimensional (2D) materials like MoS 2 . In this mini-review, the research progress in ALD MoS 2 is firstly summarized. Then the influences of precursors, substrates, temperature, and post-annealing treatment on the quality of ALD-MoS 2 are presented. Moreover, the applications of the obtained MoS 2 as an electrochemical catalysator are also described. Besides the perspective on the research of ALD of MoS 2 , the remaining challenges and promising potentials are also pointed out.

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Size-dependent piezoelectricity of molybdenum disulfide (MoS2) films obtained by atomic layer deposition (ALD)

Cited by 19 publications

References 22 publications

Atomic Layer Deposition of 2D Metal Dichalcogenides for Electronics, Catalysis, Energy Storage, and Beyond

Atomic Layer Deposition of 2D Metal Dichalcogenides for Electronics, Catalysis, Energy Storage, and Beyond

Defects-assisted piezoelectric response in liquid exfoliated MoS₂ nanosheets

Recent progress in atomic layer deposition of molybdenum disulfide: a mini review

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Size-dependent piezoelectricity of molybdenum disulfide (MoS2) films obtained by atomic layer deposition (ALD)

Cited by 19 publications

References 22 publications

Atomic Layer Deposition of 2D Metal Dichalcogenides for Electronics, Catalysis, Energy Storage, and Beyond

Atomic Layer Deposition of 2D Metal Dichalcogenides for Electronics, Catalysis, Energy Storage, and Beyond

Defects-assisted piezoelectric response in liquid exfoliated MoS2 nanosheets

Recent progress in atomic layer deposition of molybdenum disulfide: a mini review

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Defects-assisted piezoelectric response in liquid exfoliated MoS₂ nanosheets