Site-specific metrology, inspection, and failure analysis of three-dimensional interconnects using focused ion beam technology

Altmann, Frank; Young, Richard

doi:10.1117/1.jmm.13.1.011202

Cited by 14 publications

(15 citation statements)

References 8 publications

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“…However, the stage was not rotated to optimize the take-off angle of X-rays toward the EDX detector from the milled surface and thus the X-ray photon collection was not optimized and longer acquisition times were needed for the analysis. 28 Dual beam FIB/SEM has been extensively used in the semiconductor industry 29 and has found other applications in biological sciences, 30 fuel cells, optical coatings, atmospheric chemistry, 28 and primarily TEM sample preparation. 31 Applications of FIB milling in energetics have been limited.…”

Section: Dual Beam Fib/semmentioning

confidence: 99%

Incomplete reactions in nanothermite composites

Jacob

Ortiz-Montalvo

Overdeep

et al. 2017

Journal of Applied Physics

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Exothermic reactions between oxophilic metals and transition/post transition metal-oxides have been well documented owing to their fast reaction time scales (10 ls). This article examines the extent of the reaction in nano-aluminum based thermite systems through a forensic inspection of the products formed during reaction. Three nanothermite systems (Al/CuO, Al/Bi 2 O 3 , and Al/ WO 3) were selected owing to their diverse combustion characteristics, thereby providing sufficient generality and breadth to the analysis. Microgram quantities of the sample were coated onto a fine platinum wire, which was resistively heated at high heating rates (10 5 K/s) to ignite the sample. The subsequent products were captured/quenched very rapidly (500 ls) in order to preserve the chemistry/morphology during initiation and subsequent reaction and were quantitatively analyzed using electron microscopy and focused ion beam cross-sectioning followed by energy dispersive X-ray spectroscopy. Elemental examination of the cross-section of the quenched particles shows that oxygen is predominantly localized in the regions containing aluminum, implying the occurrence of the redox reaction. The Al/CuO system, which has simultaneous gaseous oxygen release and ignition (T Ignition T Oxygen Release), shows a substantially lower oxygen content within the product particles as opposed to Al/Bi 2 O 3 and Al/WO 3 thermites, which are postulated to undergo a condensed phase reaction (T Ignition T Oxygen Release). An effective Al:O composition for the interior section was obtained for all the mixtures, with the smaller particles generally showing a higher oxygen content than the larger ones. The observed results were further corroborated with the reaction temperature, obtained using a high-speed spectro-pyrometer, and bomb calorimetry conducted on larger samples (15 mg). The results suggest that thermites that produce sufficient amounts of gaseous products generate smaller product particles and achieve higher extents of completion.

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Section: Dual Beam Fib/semmentioning

confidence: 99%

Incomplete reactions in nanothermite composites

Jacob

Ortiz-Montalvo

Overdeep

et al. 2017

Journal of Applied Physics

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“…Interferometer [24,25] Tilt/deflection of sample AFM [26] Topographic of surface Pull-in [27,28] Pull-in voltage XRD [29] indentation imprint µ strain gauge [30] Strain/stress Acoustic emission [31] Device in package testing…”

Section: Destructive Non-destructivementioning

confidence: 99%

“…The last decade has witnessed an admirable surge for the introduction of diverse general characterizing and testing methods for MEMS devices, some of which are shown in Table 1 [24][25][26][27][28][29][30][31][32][33][34][35][36][37][38][39][40][41]. These methods are categorized into two main groups: destructive and non-destructive testing approaches.…”

Section: Introductionmentioning

confidence: 99%

A New Non-Invasive Air-Based Actuator for Characterizing and Testing MEMS Devices

2020

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This research explores a new ATE (Automatic Testing Equipment) method for Micro Electro Mechanical Systems (MEMS) devices. In this method, microscale aerodynamic drag force is generated on a movable part of a MEMS sensor from a micronozzle hole located a specific distance above the chip that will result in a measurable change in output. This approach has the potential to be generalized for the characterization of every MEMS device in mass production lines to test the functionality of devices rapidly and characterize important mechanical properties. The most important testing properties include the simultaneous application of controllable and non-invasive manipulative force, a single handler for multi-sensor, and non-contact characterization, which are relatively difficult to find with other contemporary approaches. Here we propose a custom-made sensing platform consisting of a microcantilever array interconnected to a data acquisition device to read the capacitive effects of each cantilever’s deflection caused by air drag force. This platform allows us to empirically prove the functionality and applicability of the proposed characterization method using airflow force stimuli. The results, stimulatingly, exhibited that air force from a hole of 5 µm radii located 25 µm above a 200 × 200 µm2 surface could be focused on a circular spot with radii of approximately 5 µm with surface sweep accuracy of <8 µm. This micro-size airflow jet can be specifically designed to apply airflow force on the MEMS movable component surface. Furthermore, it was shown that the generated air force range could be controlled from 20 nN to 60 nN, approximately, with a linear dependency on airflow ranging from 5 m/s to 20 m/s, which is from a 5 µm radius microhole air jet placed 400 µm above the chip. In this case-study chip, for a microcantilever with a length of 400 µm, the capacitance curve increased linearly from 28.2 pF to 30.5 pF with airflow variation from 5 m/s to 21 m/s from a hole. The resultant curve is representative of a standard curve for testing of the further similar die. Based on these results, this paper paves the way towards the development of a new non-contact, non-invasive, easy-to-operate, reliable, and relatively cheap air-based method for characterizing and testing MEMS sensors.

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“…For CBRAM, the switching mechanism, i.e., filament growth, has been observed using in situ STEM (scanning transmission electron microscopy)19. For observation of CF, the electron beam absorbed current (EBAC) can be used as a quick and effective method to identify different resistance levels20. The direct observation of CF in ReRAM using the EBAC supports the CF mechanism for ReRAM21.…”

mentioning

confidence: 90%

Investigation of switching mechanism in HfOx-ReRAM under low power and conventional operation modes

Feng

Shima

Ohmori

et al. 2016

Sci Rep

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Low-power resistive random access memory (LP-ReRAM) devices have attracted increasing attention owing to their advantages of low operation power. In this study, a vertical-type LP-ReRAM consisting of TiN/Ti/HfO2/TiN structure was fabricated. The switching mechanism for LP-ReRAM was elucidated as the conductive filament mechanism for conventional mode, and an interface-type switching mechanism for low power mode was proposed. The analysis of low frequency noise shows that power spectral density (PSD) is approximately proportional to 1/f for conventional operation mode. Nevertheless, for low power mode, the PSD of low resistance state (LRS) is proportional to 1/f, while that of high resistance state (HRS) is clear proportional to 1/f2. The envelope of multiple Lorentzian spectra of 1/f2 characteristics due to different traps reveals the characteristics of 1/f. For HRS of low power mode, a limited number of traps results in a characteristic of 1/f2. During the set process, the number of oxygen vacancies increases for LRS. Therefore, the PSD value is proportional to 1/f. Owing to the increase in the number of traps when the operation mode changes to conventional mode, the PSD value is proportional to 1/f. To the best of our knowledge, this is the first study that reveals the different noise characteristics in the low power operation mode from that in the conventional operation mode.

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Site-specific metrology, inspection, and failure analysis of three-dimensional interconnects using focused ion beam technology

Cited by 14 publications

References 8 publications

Incomplete reactions in nanothermite composites

Incomplete reactions in nanothermite composites

A New Non-Invasive Air-Based Actuator for Characterizing and Testing MEMS Devices

Investigation of switching mechanism in HfOx-ReRAM under low power and conventional operation modes

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