“…For NFO-CVD, however, the optical nearfield activates the molecule and the photo-dissociated Zn atom is adsorbed under the fiber probe. In NFO-CVD, the deposition rate was similar to the deposition rate using diethylzinc (DEZn) gas, although with conventional optical CVD, DEZn has a deposition rate more than 1000 times greater than that of Zn(acac) 2 . We believe that the physical origin of the photodissociation of Zn(acac) 2 is also a nonadiabatic photochemical process due to an optical near-field [10].…”