SiO<sub>2</sub>Humps Formed on Silicone Rubber by F<sub>2</sub>Laser Irradiation

Takao, Hiromitsu; Okoshi, Masayuki; Inoue, Narumi

doi:10.1143/jjap.42.1284

Cited by 28 publications

(20 citation statements)

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“…3(a). The chemical composition of the surface was also confirmed to be 5i02 by X-ray photoelectron spectroscopy [7,8]. After F2 laser irradiation near Fth, all peak intensities are low, but the peak of Si-CH3 at 1260 cm1 does not disappear in Fig.…”

Section: Resultsmentioning

confidence: 85%

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<title>F<formula><inf><roman>2</roman></inf></formula> laser ablation of silicone rubber</title>

2004

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The ablation of silicone rubber (polydimethylsiloxane, [SiO(CH3)2]) by 157-nm F2 laser irradiation has been studied. The ablation threshold fluence (Fth) was approximately 140 mJ/cm2. The irradiated surface swelled and was modified to Si02 for laser fluences below Fth. No carbon contamination was observed in the Si02. Above Fth, the surface of etched silicone rubber was structurally well defined and precisely patterned. The chemical composition of the etched surface demonstrated little change. When the silicone rubber was irradiated at laser fluences of nearly Fth, conical structures were formed on the surface. It is supposed that residual carbon photodissociated by laser irradiation initiated cone formation by locally shifting Fth to a higher value. In situ mass spectrometric analysis of gaseous products evolved during F2 laser irradiation of silicone rubber showed that CH3 and CH4 components dominated for laser fluences below Fth, fld CO component dominated for laser fluences above Fth. The high photon energy (7.9 eV) of an F2 laser could photodissociate preferentially weak bonds (Si-C) of silicone for lower laser fluence and almost all bonds (Si-C, C-H, Si-O) of silicone for higher laser fluence.

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Section: Resultsmentioning

confidence: 85%

“…We have already reported that the surface of silicone rubber swells and is modified to 5i02 by F2 laser irradiation at a laser fluence below the ablation threshold [7,8]. The modification and swelling could be caused by the photodissociated silicone and oxygen molecules by F2 laser irradiation.…”

Section: Introductionmentioning

confidence: 95%

<title>F<formula><inf><roman>2</roman></inf></formula> laser ablation of silicone rubber</title>

2004

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“…As a result, the photochemically modified polytetrafluoroethylene showed high adhesion strength with an epoxy adhesives [6]. The F 2 laser also enables a unique photochemical surface modification of a polydimethylsiloxane (silicone) rubber into a pure silica glass (SiO 2 ) [2,7,8]. Based on the modification, a SiO 2 optical waveguide or SiO 2 microlens array has been successfully fabricated on a flexible substrate of silicone rubber [9][10][11][12].…”

Section: Introductionmentioning

confidence: 99%

Micro/nano-suction cup structure of silicone rubber fabricated by ArF excimer laser

Okoshi

2019

SN Appl. Sci.

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Micro/nano-suction cups of silicone rubber, cylindrical swelling structures in micron size with a hole of hundreds nanometer diameter each, were fabricated by 193-nm ArF excimer laser-induced photodissociation of silicone rubber. To be periodically, silica glass microspheres of 2.5 μm diameter were aligned on silicone rubber via Al thin film during laser irradiation. The Al thin film underneath each microsphere was locally laser-ablated to enable a circular irradiation of subsequent laser pulses, then the exposed silicone rubber was photochemically swelled by the photodissociation of Si-O bonds of silicone rubber. Also, debris of aluminum surrounding the laser-ablated areas resulted in pushing microsphere up to adjust a focal point to the surface of silicone rubber to form a hole centered at each the swelled silicone. The fabricated structure showed clear superhydrophobic properties. Dependence of single pulse fluence of ArF excimer laser on the fabrication of micro/nano-suction cup structure was discussed, together with the variation of thickness of Al thin film from 10 to 100 nm. The use of the superhydrophobic silicone rubber we fabricated is expected as a kind of delivery system, toward holding a small object even in water by each micro/nano-suction cup structure.

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“…We verified new methods for photochemical surface modification of silicone rubber using vacuum ultraviolet lasers. Particularly, we previously reported that when silicone is irradiated with an F 2 laser (wavelength: 157 nm), only exposed portions are modified into silica glass (SiO 2 ) . Based on that result, we conducted fundamental research to fabricate flexible optical devices through directly forming SiO 2 optical waveguides and microlenses on silicone rubber .…”

Section: Introductionmentioning

confidence: 99%

Formation of textured Al thin film on periodic microswelling structure fabricated on silicone rubber surface to realize superhydrophobicity

Okoshi

2019

Elect Comm in Japan

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Periodic microswelling structure was fabricated on silicone rubber by the 193‐nm ArF excimer laser induced photodissociation of silicone; subsequent deposition of Al thin film on the sample surface significantly improved the superhydrophobicity. To discuss the improvement, Al thin film was deposited on a flat slide glass, silicone rubber, and silicone resin substrates. Under a scanning electron microscope, textured structure of Al thin film was found only on the silicone rubber. As a result, contact angle of water on the sample with the textured Al indicated to be approximately 165°, compared with the case of 155° before Al deposition.

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SiO₂Humps Formed on Silicone Rubber by F₂Laser Irradiation

Cited by 28 publications

References 1 publication

<title>F<formula><inf><roman>2</roman></inf></formula> laser ablation of silicone rubber</title>

<title>F<formula><inf><roman>2</roman></inf></formula> laser ablation of silicone rubber</title>

Micro/nano-suction cup structure of silicone rubber fabricated by ArF excimer laser

Formation of textured Al thin film on periodic microswelling structure fabricated on silicone rubber surface to realize superhydrophobicity

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SiO2Humps Formed on Silicone Rubber by F2Laser Irradiation

Cited by 28 publications

References 1 publication

<title>F<formula><inf><roman>2</roman></inf></formula> laser ablation of silicone rubber</title>

<title>F<formula><inf><roman>2</roman></inf></formula> laser ablation of silicone rubber</title>

Micro/nano-suction cup structure of silicone rubber fabricated by ArF excimer laser

Formation of textured Al thin film on periodic microswelling structure fabricated on silicone rubber surface to realize superhydrophobicity

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SiO₂Humps Formed on Silicone Rubber by F₂Laser Irradiation