Formation of textured Al thin film on periodic microswelling structure fabricated on silicone rubber surface to realize superhydrophobicity

Abstract

Periodic microswelling structure was fabricated on silicone rubber by the 193‐nm ArF excimer laser induced photodissociation of silicone; subsequent deposition of Al thin film on the sample surface significantly improved the superhydrophobicity. To discuss the improvement, Al thin film was deposited on a flat slide glass, silicone rubber, and silicone resin substrates. Under a scanning electron microscope, textured structure of Al thin film was found only on the silicone rubber. As a result, contact angle of water on the sample with the textured Al indicated to be approximately 165°, compared with the case of 155° before Al deposition.

Periodic cylindrical structure of micro‐swelling silicone rubber fabricated by ArF excimer laser

“…6,7 Moreover, deposition of Al thin film on the silicone rubber surface with periodic micro-swelling structures was found to provide a microtexture for even higher superhydrophobicity. [8][9][10] In addition, a method was found to change the shape of fabricated micro-swelling structures from frusto-conical to cylindrical. [11][12][13] This paper presents further results obtained by the author, namely, that high cylindrical micro-swelling structures can be formed on silicone rubber uniformly and with a big height by means of purging oxygen on laser's optical F I G U R E 1 SEM image of silica glass microsphere alignment on Al-coated silicone rubber path with nitrogen, and setting lower pulse repetition rate.…”