1994
DOI: 10.1063/1.111314
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Sintered aerosol masks for dry-etched quantum dots

Abstract: We report on a sintering step in producing ultra-fine silver aerosol particles to serve as etch masks for semiconductor quantum-dot structures. Our experiments found heating conditions that reshape the Ag particles, resulting in a spherical shape and very good size uniformities. Using this improved aerosol generation technology, we have dry etched InP columns with 24+5 run diameter and with very good uniformity, with nearly every aerosol particle resulting in a column. Column arrays with a density as high as 3… Show more

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Cited by 30 publications
(6 citation statements)
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“…The aerosol generator set up, which is described in detail elsewhere, 11 consists of a furnace tube with an Ag containing ceramic boat. This first furnace for the aerosol generation was kept at a temperature of 1240°C, resulting in a sufficiently high number of particles with diameters below 100 nm.…”
Section: Methodsmentioning
confidence: 99%
“…The aerosol generator set up, which is described in detail elsewhere, 11 consists of a furnace tube with an Ag containing ceramic boat. This first furnace for the aerosol generation was kept at a temperature of 1240°C, resulting in a sufficiently high number of particles with diameters below 100 nm.…”
Section: Methodsmentioning
confidence: 99%
“…For example, Deppert et al. ( 1994 ) deposited spherical silver particles on a semiconductor to serve as etch masks for quantum-dot structures and Kang et al. ( 2004 ) prepared patterns consisting of silver nanoparticles for electronic devices.…”
Section: Introductionmentioning
confidence: 99%
“…Previously, supported metal particles have been obtained by a wide variety of techniques including electric-field-assisted deposition of metal aerosols, , vacuum evaporation of metals, diffusion-controlled aggregation, inert gas evaporation, e-beam and X-ray nanolithography, accumulation of colloidal metal particles from solution onto a charged support, , and chemical and electrochemical deposition of metals into nanoscopic templates. …”
Section: Introductionmentioning
confidence: 99%