Single-pole-four-throw switch using high-aspect-ratio lateral switches

Liu, A.Q.; Palei, W.; Tang, Min; Alphones, Arokiaswami

doi:10.1049/el:20045718

Cited by 21 publications

(7 citation statements)

References 4 publications

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“…Electrostatic devices, on the contrary, can be produced with simpler manufacturing processes, but require higher actuation voltages. However, the example devices reported in Table 2 show that research is aimed at improving the electrical requirements for electrostatic MEMS switches, with actuation voltages scaling from approximately 30-50 V [77,79,81,84] to 10-15 V [85,86]. Further design and fabrication enhancements have enabled the production of electrostatic MEMS switches with actuation voltages lower than 10 V [21,[45][46][47].…”

Section: Examples Of Generic Mems Switches With Various Actuation Schmentioning

confidence: 99%

Integrated Magnetic MEMS Relays: Status of the Technology

2014

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Abstract:The development and application of magnetic technologies employing microfabricated magnetic structures for the production of switching components has generated enormous interest in the scientific and industrial communities over the last decade. Magnetic actuation offers many benefits when compared to other schemes for microelectromechanical systems (MEMS), including the generation of forces that have higher magnitude and longer range. Magnetic actuation can be achieved using different excitation sources, which create challenges related to the integration with other technologies, such as CMOS (Complementary Metal Oxide Semiconductor), and the requirement to reduce power consumption. Novel designs and technologies are therefore sought to enable the use of magnetic switching architectures in integrated MEMS devices, without incurring excessive energy consumption. This article reviews the status of magnetic MEMS technology and presents devices recently developed by various research groups, with key focuses on integrability and effective power management, in addition to the ability to integrate the technology with other microelectronic fabrication processes.

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Section: Examples Of Generic Mems Switches With Various Actuation Schmentioning

confidence: 99%

Integrated Magnetic MEMS Relays: Status of the Technology

2014

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“…The incorporation of MEMS-based fabrication technologies into microwave and millimeter-wave systems offers viable routes toward ICs with MEMS actuators, antennas, switches, and transmission lines [1][2][3][4][5][6][7]. Micro-electromechanical system (MEMS) technology has attracted tremendous interest across the world, and research efforts are constantly growing for reliability and integration purposes.…”

Section: Introductionmentioning

confidence: 99%

RF MEMS ohmic switches for matrix configurations

Angelis

Lucibello

Proietti

et al. 2012

Int. J. Microw. Wireless Technol.

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Two different topologies of radio frequency micro-electro-mechanical system (RF MEMS) series ohmic switches (cantilever and clamped–clamped beams) in coplanar waveguide (CPW) configuration have been characterized by means of DC, environmental, and RF measurements. In particular, on-wafer checks have been followed by RF test after vibration, thermal shocks, and temperature cycles. The devices have been manufactured on high resistivity silicon substrates, as building blocks to be implemented in different single-pole 4-throw (SP4 T), double-pole double-throw (DPDT) configurations, and then integrated in Low Temperature Co-fired Ceramics (LTCC) technology for the realization of large-order Clos 3D networks

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“…SPMT switches containing thin metal films do not maintain mechanical reliability due to film deformation caused by heat or stress during complex fabrication processes [4]. Even if those conditions are optimal, insertion loss is large due to substrate loss and open-stub effects caused by multipath fading [5]. Also, high drive voltage is required to generate essentially a large contact force for low insertion loss [6].…”

Section: Introductionmentioning

confidence: 99%

A Single-Pole, Eight-Throw, Radio-Frequency, MicroElectroMechanical Systems Switch for Multi-Band / Multi-Mode Front-End Module

Kang¹,

Kim²,

Chun³

2011

Journal of Sensor Science and Technology

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This paper presents a single-pole eight-throw(SP8T) switch based on proposed a radio-frequency(RF) microelectromechanical systems (MEMS) switches. The proposed switch was driven by a double stop(DS) comb drive, with a lateral resistive contact. Additionally, the proposed switch was designed to have tapered signal line and bi-directionally actuated. A forward actuation connects between signal lines and contact part, and the output becomes on-state. A reverse actuation connects between ground lines and contact part, and the output becomes off-state. The SP8T switch of 3-stage tree topology was developed based on an arrangement of the proposed RF MEMS switches. The developed SP8T switch had an actuation voltage of 12 V, an insertion loss of 1.3 dB, a return loss of 15.1 dB, and an isolation of 31.4 dB at 6 GHz.

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Single-pole-four-throw switch using high-aspect-ratio lateral switches

Cited by 21 publications

References 4 publications

Integrated Magnetic MEMS Relays: Status of the Technology

Integrated Magnetic MEMS Relays: Status of the Technology

RF MEMS ohmic switches for matrix configurations

A Single-Pole, Eight-Throw, Radio-Frequency, MicroElectroMechanical Systems Switch for Multi-Band / Multi-Mode Front-End Module

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