Single mode fiber MT-RJ SFF transceiver module using optical subassembly with a new shielded silicon optical bench

Iwase, Masayuki; Nomura, Takuji; Izawa, Atsushi; Mori, Hajime; Tamura, Shinichi; Shirai, Tomohiro; Kamiya, Toshio

doi:10.1109/6040.982824

Cited by 5 publications

(1 citation statement)

References 9 publications

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“…Silicon optical bench (SiOB) technology has become a critical solution for aligning micro optical components on silicon substrates in high precision. It has been widely used in a variety of applications in micro optics packaging, such as optical transmitters [1]/receivers [2]/transceivers [3], filters [4,5], switches [6], attenuators [7] and splitters [8], and even in more complex micro optical systems, such as micromachined tunable lasers [9,10], Mach-Zehnder interferometers [11], and Fourier transform spectrometers [12], as well as miniaturized catheters for endoscopic optical coherence tomography (EOCT) imaging [13,14].…”

Section: Introductionmentioning

confidence: 99%

Platinum microheater integrated silicon optical bench assembly for endoscopic optical coherence tomography

Wang

Premachandran

et al. 2009

J. Micromech. Microeng.

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A novel platinum microheater and comb isolator integrated silicon optical bench (SiOB) assembly method has been successfully demonstrated to provide electrical connection and high precision alignment for a two-axis gimbal-less micromirror. Localized heating and wetting of plastic core micro solder balls is achieved by the integrated platinum heater, and the maximum measured temperature of the platinum heater is about 250 • C. In addition, assembly procedures are significantly simplified by involving a comb isolator made by deep reactive ion etching (DRIE) in comparison with our previously reported design. DRIE is also applied to form a 45 • trench on the lower silicon substrate with a nearly vertical sidewall for the micromirror. Hence, the overall dimensions of the SiOB assembly can be reduced further to meet the requirements of endoscopic optical coherence tomography (EOCT) for miniaturization.

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