Single-mask microfabrication of aspherical optics using KOH anisotropic etching of Si

Monteiro, Davies William de Lima; Akhzar-Mehr, O.; Sarro, P.M.; Vdovin, Gleb

doi:10.1364/oe.11.002244

Cited by 44 publications

(31 citation statements)

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“…The method consists in approximating a target surface by overlapping spherical depressions, each with specific depths. We demonstrated in [6] 1 and 5 mm aspherical phase plates reproducing defocus, tilt, astigmatism and high-order Zernike polynomials. This technology has a potential for serial production of reflective and refractive arbitrary aspherical micro-optical components.…”

Section: Resultsmentioning

confidence: 98%

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Prime Microlens Arrays for Hartmann-Shack Sensors: An Economical Fabrication Technology

Monteiro

Akhzar-Mehr

Vdovin

2005

Adaptive Optics for Industry and Medicine

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Summary.A Hartmann-Shack wavefront sensor consists basically of two elements: a microlens array and a photosensitive detector. This paper presents a technique to fabricate close-packed microlens arrays compliant to the sensor requirements. The method is based on bulk-silicon anisotropic etching and requires a single etch mask. We first etch a micromirror array in a KOH solution and use it later as a mold for the replication of microlens arrays. The elements in the fabricated microlens arrays feature excellent fit to a parabolic mirror surface, 100% optical fill factor, excellent parallelism of the optical axes and very high precision of the array pitch. The uniformity of the focal length of the microlenses is high (in the order of 5%) and the surface roughness -expressed in terms of wavefront -is of the order of 8-13 nm. This technology also enables simple single-mask fabrication of arbitrary aspherical optical surfaces.

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Section: Resultsmentioning

confidence: 98%

“…This technology also provides the means to realize micro-optical components with arbitrary profiles as reported in [6]. In later sections we explain the method and validate its assumptions with experimental results.…”

Section: Introductionmentioning

confidence: 90%

Prime Microlens Arrays for Hartmann-Shack Sensors: An Economical Fabrication Technology

Monteiro

Akhzar-Mehr

Vdovin

2005

Adaptive Optics for Industry and Medicine

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“…We developed a method, based on the technology presented in the previous section, in which we approximate arbitrary surfaces by overlaying NxN spherical cavities with different sagittae and diameters. 33 The sagitta s of each cavity is proportional to the size of the respective initial opening d 0 on the oxide mask: s = αd 0 , where α is a parameter that depends on the etch ratio between different planes, on the etchant concentration and on the etching temperature.…”

Section: Micro-optical Components With Arbitrary Aspherical Shapesmentioning

confidence: 99%

Silicon micro-optics for smart light control

et al. 2004

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We present an overview of the results of our recent research in the field of adaptive optical components based on silicon microtechnologies, including membrane deformable mirrors, spatial light modulators, liquid-crystal correctors, wavefront sensors, and both spherical and aspherical micro-optical components. We aim at the realization of adaptive optical systems using standard-technology solutions.

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“…Like classical lenses, microlenses can have a concave or a convex shape. Microlenses usually have an aspherical profile, but can also have a spherical profile [5,6]. Standard dimensions for microlenses are from several tens of micrometers to one millimeter.…”

Section: Introductionmentioning

confidence: 99%

Aberrations of Betanin Sensitized Gelatin Microlenses

et al. 2009

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Aberrations of the concave aspherical microlenses are presented. Microlenses are produced by using betanin sensitized gelatin and 532 nm laser irradiation (2nd Nd:YAG harmonic). Aberrations are analyzed by calculation of the longitudinal spherical aberration and the root mean square RMS spot radius. Three presented microlenses had good image quality for the large F number and the moderate field angle.

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Single-mask microfabrication of aspherical optics using KOH anisotropic etching of Si

Cited by 44 publications

References 2 publications

Prime Microlens Arrays for Hartmann-Shack Sensors: An Economical Fabrication Technology

Prime Microlens Arrays for Hartmann-Shack Sensors: An Economical Fabrication Technology

Silicon micro-optics for smart light control

Aberrations of Betanin Sensitized Gelatin Microlenses

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