Single Interdigital Transducer as Surface Acoustic Wave Impedance Sensor

Nguyen, Vu Hoa; Richert, S.; Park, H.; Böker, Alexander; Schnakenberg, Uwe

doi:10.1016/j.protcy.2017.04.032

Cited by 2 publications

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“…Originally applied for surface acoustic wave (SAW) generation (White, Voltmer, 1965), periodic conducting strips applied on plane surface of solid (piezoelectric) body play an important role in many applications and in various fields like non-destructive testing (NDT) (Na et al, 2008), microelectromechanical systems (MEMS) (Wang et al, 2009), telecommunications (Fissi et al, 2015), chemical sensing (Nguyen et al, 2017), piezo-acoustics (Daniau et al, 2004), and biotechnology (Senveli, Tigli, 2015; Danicki et al, 2013). Different methods of analysis of periodic conducting strips were reported in literature from theoretical (Blotekjar et al, 1973;Biryukov, Polevoi, 1996;Peach, 1981;Danicki, 1996) to purely numerical (Morgan, 1999;Bausk et al, 2002).…”

Section: Introductionmentioning

confidence: 99%

Archives of Acoustics

Tasinkevych

Trots

Tymkiewicz

2020

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The purpose of this work is to present a theoretical analysis of top orthogonal to bottom arrays of conducting electrodes of infinitesimal thickness (conducting strips) residing on the opposite surfaces of piezoelectric slab. The components of electric field are expanded into double periodic Bloch series with corresponding amplitudes represented by Legendre polynomials, in the proposed semi-analytical model of the considered two-dimensional (2D) array of strips. The boundary and edge conditions are satisfied directly by field representation, as a result. The method results in a small system of linear equations for unknown expansion coefficients to be solved numerically. A simple numerical example is given to illustrate the method. Also a test transducer was designed and a pilot experiment was carried out to illustrate the acoustic-wave generating capabilities of the proposed arrangement of top orthogonal to bottom arrays of conducting strips.

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Section: Introductionmentioning

confidence: 99%

Archives of Acoustics

Tasinkevych

Trots

Tymkiewicz

2020

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“…8 . As several papers 9 – 14 pointed out, SAW-based devices have high potential for sensing applications. The interest on SAW sensors include not only gravimetric applications, but also bio-applications - owing to chemical and biochemical adsorption taking places at surfaces in liquid environments -, by means of delay-line or resonating configurations, even in combination with microfluidic systems.…”

Section: Introductionmentioning

confidence: 99%

Numerical emulation of Thru-Reflection-Line calibration for the de-embedding of Surface Acoustic Wave devices

Mencarelli

Djafari‐Rouhani

Pennec

et al. 2018

Sci Rep

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In this contribution, a rigorous numerical calibration is proposed to characterize the excitation of propagating mechanical waves by interdigitated transducers (IDTs). The transition from IDT terminals to phonon waveguides is modeled by means of a general circuit representation that makes use of Scattering Matrix (SM) formalism. In particular, the three-step calibration approach called the Thru-Reflection-Line (TRL), that is a well-established technique in microwave engineering, has been successfully applied to emulate typical experimental conditions. The proposed procedure is suitable for the synthesis/optimization of surface-acoustic-wave (SAW) based devices: the TRL calibration allows to extract/de-embed the acoustic component, namely resonator or filter, from the outer IDT structure, regardless of complexity and size of the letter. We report, as a result, the hybrid scattering parameters of the IDT transition to a mechanical waveguide formed by a phononic crystal patterned on a piezoelectric AlN membrane, where the effect of a discontinuity from periodic to uniform mechanical waveguide is also characterized. In addition, to ensure the correctness of our numerical calculations, the proposed method has been validated by independent calculations.

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Single Interdigital Transducer as Surface Acoustic Wave Impedance Sensor

Cited by 2 publications

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Archives of Acoustics

Archives of Acoustics

Numerical emulation of Thru-Reflection-Line calibration for the de-embedding of Surface Acoustic Wave devices

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