2022
DOI: 10.1063/5.0097407
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Single G centers in silicon fabricated by co-implantation with carbon and proton

Abstract: We report the fabrication of isolated G centers in silicon with single photon emission at optical telecommunication wavelengths. Our sample is made from a silicon-on-insulator wafer, which is locally implanted with carbon ions and protons at various fluences. Decreasing the implantation fluences enables us to gradually switch from large ensembles to isolated single defects, reaching areal densities of G centers down to ∼0.2  μm−2. Single defect creation is demonstrated by photon antibunching in intensity-corre… Show more

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Cited by 17 publications
(21 citation statements)
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“…It can be explained by the delocalised nature of the excitonic excited state, so the similar hole spin density governs the interaction as for the positively charged defect. We find good agreement for the calculated positively charged defect 13 C hyperfine parameters of A xx = 5.9 MHz, A yy = 5.2 MHz and A zz = 153.9 MHz with the reported values of the Si-G15 EPR centre 27 1a].…”
Section: Spin Propertiessupporting
confidence: 82%
See 3 more Smart Citations
“…It can be explained by the delocalised nature of the excitonic excited state, so the similar hole spin density governs the interaction as for the positively charged defect. We find good agreement for the calculated positively charged defect 13 C hyperfine parameters of A xx = 5.9 MHz, A yy = 5.2 MHz and A zz = 153.9 MHz with the reported values of the Si-G15 EPR centre 27 1a].…”
Section: Spin Propertiessupporting
confidence: 82%
“…at 13 C, 17 O, and 29 Si isotopes surrounding the defect (see Supplementary Note 2). We conclude that the hyperfine interaction in the neutral triplet excited state of the defect is very similar to that of the positive doublet ground state, only incorporating a scaling factor of 2 of the two spin quantum numbers in the neutral and positive charge states.…”
Section: Spin Propertiesmentioning
confidence: 99%
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“…A promising alternative route exploits the integration of isolated atoms into the photonic chip, such as erbium ions or isolated defects acting as artificial atoms. By embedding one such emitter in a SOI cavity, one expects to tailor its spontaneous emission (SE) thanks to cavity quantum electrodynamics (CQED) effects and to control the single-photon generation process . Concerning color centers in Si, particular attention has been devoted to the G and T centers so far. Ensembles of G centers have been integrated in a metasurface, micropillars, and Mie resonators to improve light extraction out of silicon, and efficient collection of single photons has been reported for a T center in a nanobeam . Cavity enhancement of the zero-phonon emission has been demonstrated for an ensemble of G centers in a microring cavity and in a 2D photonic crystal (PhC) cavity for a single G center .…”
Section: Introductionmentioning
confidence: 99%