Single-Crystal-Silicon Continuous Membrane Deformable Mirror Array for Adaptive Optics in Space-Based Telescopes

Jung, Il Woong; Peter, Yves-Alain; Carr, Emily; Wang, Jen-Shiang; Solgaard, Olav

doi:10.1109/jstqe.2007.893560

Cited by 32 publications

(13 citation statements)

References 8 publications

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“…Microelectromechanical systems (MEMS) that include optical components are often referred to as micro-opto-electromechanical systems (MOEMS). Recently, Si MEMS have been employed for optical components such as optical switches, micro-mirrors, projection displays, adaptive optics and variable optical attenuator [1][2][3][4][5][6][7][8]. Smoothing the sidewall of microstructures is technologically important for producing optical components.…”

Section: Introductionmentioning

confidence: 99%

Smoothing dry-etched microstructure sidewalls using focused ion beam milling for optical applications

Song¹,

Peter²,

Meunier³

2007

J. Micromech. Microeng.

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This paper presents a new sidewall smoothing process for Si micro-optical components using focused ion beam (FIB) milling. First, the deep reactive ion etching (DRIE) Bosch process is employed to form a microstructure on a Si substrate. However, scalloping which is induced on the sidewall by the repetition of etching and passivation steps is a major source of light scattering, reducing surface reflectivity in optical applications. In this research, FIB is used to smooth the rough sidewall surface and obtain polished mirror surface. After the DRIE Bosch process, the values of sidewall roughness as measured by atomic force microscopy were 153.0 ± 13.5 nm with an rms value of 28.1 ± 6.4 nm. The FIB smoothing process tremendously improved the surface roughness of etched sidewalls resulting in a maximum peak-to-valley roughness and an rms roughness of 5.7 ± 1.8 nm and 1.6 ± 0.7 nm, respectively. In this paper, the DRIE Bosch process and the FIB smoothing process are described in detail and applications using this technique are discussed.

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Section: Introductionmentioning

confidence: 99%

Smoothing dry-etched microstructure sidewalls using focused ion beam milling for optical applications

Song¹,

Peter²,

Meunier³

2007

J. Micromech. Microeng.

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“…However, fabrication of a SCS membrane DM is difficult as it need to transfer a thin(<3μm) and large(>1mm) SCS layer to an electrode substrate which requires a stable wafer bonding and release technique. Some SCS membrane DMs have been developed by combining wafer bonding technique and silicon micromaching [1][2][3], in which a continuous high quality optical surface with extremely low surface roughness(<2nm) is achieved. However, the stroke of these DM is limited, especially lower than 1μm.…”

Section: Introductionmentioning

confidence: 99%

15μM air gap 8×8/4×4 pixels single crystal silicon continuous membrane deformable mirror

Sasaki

Akiyama

et al. 2013

2013 Transducers &Amp; Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems

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We propose, design and fabricate here an electrostatically actuated continuous single-crystal-silicon membrane deformable mirror (DM) for astronomical observation. To get a large stroke, a bimorph spring array is used to generate a large air gap between the mirror membrane and the electrode. A DM with a 1.8mm × 1.8mm mirror membrane is fabricated by combining Au-Si eutectic wafer bonding and the subsequent all-dry release process. The stroke of the DM is 3.5μm at 115V. The influence function on the nearest neighbor is 51%. The fill factor of the DM is 99.9%.

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“…DMs based on piezo-electric actuation which suffer from hysteresis problem are not preferable for the open-loop control in astronomical application [1]. In comparison, DMs based on electrostatic actuation are free of hysteresis but limited in the stroke [2]. Although a segmented electrostatic DM was demonstrated to possess a large stroke (~10μm) [3], diffraction due to the gaps between segmented elements downgrades the optical performance.…”

Section: Introductionmentioning

confidence: 99%

“…Last, the hardness for depositing a thick (>5μm ) sacrificial layer limits the achievable thickness of the air gap. This directly limits the stroke of the surface micromachined DM, especially lower than 2μm [2,4].…”

Section: Introductionmentioning

confidence: 99%

A continuous single-crystal-silicon membrane deformable mirror using bimorph spring

Sasaki

Akiyama

et al. 2013

SPIE Proceedings

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We propose, design and fabricate here an electrostatically actuated continuous single-crystal-silicon membrane deformable mirror (DM) for astronomical observation. To get a large stroke, a bimorph spring array is used to generate a large air gap between the mirror membrane and the electrode. A DM with a 1.8mm×1.8mm mirror membrane are fabricated by combining Au-Si eutectic wafer bonding and the subsequent all-dry release process. The stroke of the DM is 3.5μm at 115V. The influence function on the nearest neighbor is 51%. The fill factor of the DM is 99.9%.

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Single-Crystal-Silicon Continuous Membrane Deformable Mirror Array for Adaptive Optics in Space-Based Telescopes

Cited by 32 publications

References 8 publications

Smoothing dry-etched microstructure sidewalls using focused ion beam milling for optical applications

Smoothing dry-etched microstructure sidewalls using focused ion beam milling for optical applications

15μM air gap 8×8/4×4 pixels single crystal silicon continuous membrane deformable mirror

A continuous single-crystal-silicon membrane deformable mirror using bimorph spring

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Single-Crystal-Silicon Continuous Membrane Deformable Mirror Array for Adaptive Optics in Space-Based Telescopes

Cited by 32 publications

References 8 publications

Smoothing dry-etched microstructure sidewalls using focused ion beam milling for optical applications

Smoothing dry-etched microstructure sidewalls using focused ion beam milling for optical applications

15&#x03BC;M air gap 8&#x00D7;8/4&#x00D7;4 pixels single crystal silicon continuous membrane deformable mirror

A continuous single-crystal-silicon membrane deformable mirror using bimorph spring

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15μM air gap 8×8/4×4 pixels single crystal silicon continuous membrane deformable mirror