Single-atom fabrication with electron and ion beams: From surfaces and two-dimensional materials toward three-dimensional atom-by-atom assembly

Abstract

Abstract

Atomic Mechanisms for the Si Atom Dynamics in Graphene: Chemical Transformations at the Edge and in the Bulk

“…8,9 However, advances in low-voltage probes have enabled studies in which only a small number of atomic species and chemical bonds change during imaging, enabling dynamic studies of beam-induced transformations. [10][11][12][13] Phenomena such as oxygen vacancy ordering, 14 dopant atom dynamics, 12 formation of topological defects and bond formation and breaking, [15][16][17] and vacancy formation 18 etc. have been visualized with atomic resolution.…”

The Atomic Circus: Small Electron Beams Spotlight Advanced Materials Down to the Atomic Scale

“…Aberration‐corrected STEM/TEM has grown as an all‐round characterization and even fabrication platform for advanced materials, not only for functional materials, with complex atomic‐scale structural defects that are dynamically responding to external fields, but also for 2D materials and electrocatalysts. It is an atomic circus observed or even created by small electron beams, a completely new paradigm in which one can directly visualize and even manipulate advanced materials at the atomic scale, including single atoms, various types of structural defects, their aggregation and dynamics …”

“…Positioning and manipulation of dopant atoms in specific locations can be achieved by a tiny electron beam . Many such examples can be found in a special issue of the MRS Bulletin …”

Graphene Defect Editing, Deposition, and Growth via E-Beam-Induced Organic Reactions in Aberration Corrected STEM

“…With the rise of aberration correction in modern electron microscopy and the readily available, technologically relevant 2D materials, new possibilities are opening up in the realm of in situ scanning transmission electron microscopy (STEM). [1][2][3][4] Specifically, sub-angstrom probes are routinely achieved and in 2D materials these focused beams may be directed onto single atoms, thus creating an atomically localized fabrication environment which can be monitored in real time with atomic resolution. [5][6][7] Beam-induced sample changes are nothing new but the view that such alterations need to be strictly avoided is beginning to change.…”