Simultaneous recrystallization, phosphorous diffusion and antireflection coating of silicon films using laser treatment

Direct micropatterning of high dielectric BaTiO3 films by laser-induced pyrolysis with a nano-crystalline seeding technique

“…The intensities of peaks due to the tetragonal phase at this energy density were low in comparison with those at the other energy densities. Results similar to this low crystallinity of the tetragonal phase in the film have been reported in previous works [28][29][30]. Mizunami and Toyama suggested that excessively high energies induce surface ablation or substrate evaporation that degrades the crystal quality [28].…”

“…Hou et al reported that grain sizes were uniform and reached nanometer magnitude above a threshold temperature in laser-irradiation of Sn-Se-Sb-Co amorphous films, though they stated that this phenomenon might not be able to be interpreted by conventional crystallography theories [29]. Lien et al showed that grain sizes decreased with an increase in laser energy over a threshold in fabrication of silicone films with the use of laser [30]. Besides the weak tetragonal peaks, new peaks appeared around 600 and 880 cm À1 , both of which could not be assigned to the tetragonal phase ( Fig.…”