Simultaneous Patterning of Independent Metal/Metal Oxide Multi-Layer Films Using Two-Tone Photo-Acid Generating Compound Systems

Abstract

(1) The photo-induced solubility and positive-tone direct photo-patterning of iron, copper and lanthanides chelated with 4-(2-nitrobenzyloxycarbonyl)catechol (NBOC) or 4-(6-nitroveratryloxycarbonyl)catechol (NVOC) was investigated. Photo-patterning of iron, copper, cerium, samarium, europium, terbium, dysprosium, holmium, erbium and lutetium complexes was accomplished. Continuous films were formed by the pyrolysis of metal complex films at 500 °C. (2) Based on the difference in the photo-reaction excitation wavelength profile of NBOC and NVOC complexes, a short and simple method for simultaneous micro-patterning of two independent films on each side of a transparent glass substrate was developed. Using the developed procedure, indium tin oxide and/or titanium oxide films were formed on each side of a quartz substrate without use of resist or etching.

Formation of Micrometer Scale Metal Structures on Glass by Selective Electroless Plating on Photopatterned Titanium and Copper Containing Films

“…The TEA induced LMCT blue shift, decreasing the overlap with DNQ excitation in the DNQ system, while increasing the overlap with NBOC excitation in the NBOC system can account for efficiency enhancement in the DNQ system and opposite effect in the NBOC system. Compared to NBOC-Ti, initially rapid photoinduced solubility has been reported for NBOC-Cu films, 19 which showed relatively low LMCT absorption. The photoinduced solubility characteristics of NBOC-TiCu were similar to those of NBOC-Ti; 12 thus, the NBOC-Ti LMCT adsorption and NBOC excitation profile overlap would best explain the rate determining factor in the solubility inducing photoreaction.…”

“…The photoreactive metal complex solutions were designed for photoinduced film solubility contrast using dilute aqueous alkaline solution as the developer. Photopatterned titanium oxide or copper oxide film formation from the respective NBOC-Ti 12 or NBOC-Cu 19 films has been demonstrated. To create an analogous system to the NBOC-M compounds, the combination of a 3,4-dihydroxybenzoate ester ligand and a DNQ ester was investigated.…”

Simultaneous Direct Formation of Fine Copper Mesh Transparent Electrodes on Both Sides of Glass Substrate Using Wavelength Selective Photoreactive Niobium Complexes

“…Independent mesh patterns rotated 45° with respect to each other were formed on both sides of quartz glass (50 × 50 × t1.0 mm) according to the described procedure outlined in Scheme 1 14) except NBOC-Ti was replaced with NBOC-Nb and NVOC-Ti with NVOC-Nb, and the exposure equipment, photomask, filter and parameters described above and exposure times determined above were implemented.…”

“…Therefore, simplified methods were investigated based on copper fine mesh type electrodes formed by direct pattern plating 13) and wavelength selective two-layer photopatterning. 14) Furthermore, use of copper fine mesh type transparent electrodes also allows independence from indium.…”