2017
DOI: 10.1364/oe.25.018152
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Simultaneous multi-segmented mirror orientation test system using a digital aperture based on sheared Fourier analysis

Abstract: This paper presents a simultaneous multi-segmented mirror orientation test system (SMOTS) using localized sheared images. A CMOS camera captures images of reflected 2D sinusoidal patterns from the test mirrors as their orientation changes. Surface orientation is measured to within 0.8 µrad (0.16 arcseconds) for a flat mirror. In addition, we measure the variation of seven mirror segments simultaneously. Furthermore, SMOTS is applied to measure the orientation of two concave mirrors with an accuracy of 2.7 µrad… Show more

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Cited by 22 publications
(5 citation statements)
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“…The angular and linear positioning accuracy were identified to be 0.005° and 5 μm, respectively [258]. A similar application has been reported for alignment of multi-segmented mirrors on a polishing machine [31]. A CMOS camera captured images of reflected 2D sinusoidal patterns from seven multi-segmented mirrors for measurement of the surface orientations of the mirror segments with a resolution of 0.16 arcseconds in a time of 0.07 s, based on which the alignment of each mirror segment was carried out.…”
Section: Fringe Reflection (Fringe Deflectometry)supporting
confidence: 69%
“…The angular and linear positioning accuracy were identified to be 0.005° and 5 μm, respectively [258]. A similar application has been reported for alignment of multi-segmented mirrors on a polishing machine [31]. A CMOS camera captured images of reflected 2D sinusoidal patterns from seven multi-segmented mirrors for measurement of the surface orientations of the mirror segments with a resolution of 0.16 arcseconds in a time of 0.07 s, based on which the alignment of each mirror segment was carried out.…”
Section: Fringe Reflection (Fringe Deflectometry)supporting
confidence: 69%
“…The flexibility of the deflectometry layout and dynamic range has been used for various types of testing, such as simultaneous multi-segmented optics orientation testing and instantaneous optical surface measurement. [15][16][17] The performance of the extended deflectometry showed comparable accuracy with an interferometer. It also showed a far better accuracy than similar dynamic range instruments, as shown in Figure 4 (b).…”
Section: Introduction To Deflectometrymentioning
confidence: 87%
“…Developments to improve the coarse alignment of segmented mirrors are on-going and will eventually provide a more efficient and accurate method of positioning the segments. One multisegment alignment technology utilizes a sheared Fourier analysis to obtain the tip/tilt of many mirror segments over a wide dynamic range [203]. This multisegment alignment system uses a similar setup to the deflectometry system used during fabrication, where a 2D sinusoidal pattern is displayed on a screen and the pattern is captured by a camera in reflection from the segments under test.…”
Section: Segmented Mirror Alignmentmentioning
confidence: 99%
“…Image credit: H.Choi. Reprinted with permission from[203]. Copyright 2017 Optical Society of America.…”
mentioning
confidence: 99%