2018 IEEE Micro Electro Mechanical Systems (MEMS) 2018
DOI: 10.1109/memsys.2018.8346792
|View full text |Cite
|
Sign up to set email alerts
|

Simultaneous improvement of surface finish and bonding of centrifugal microfluidic devices in cyclo-olefin polymers

Abstract: Two key issues in the manufacturing of microfluidic devices are to obtain low surface roughness, i.e. in the range of nanometers (to facilitate optical detection and controlled flow through microfluidic networks), and to achieve robust bonding. Here we report that a chemical polishing step, used for smoothening the surface of cycloolefin polymer (COP) components manufactured by micromilling, reduces the surface roughness (to Ra ~ 150 nm) and facilitates a leak-tight COP-COP bond. We report new results on COP s… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2

Citation Types

0
2
0

Year Published

2019
2019
2021
2021

Publication Types

Select...
2

Relationship

0
2

Authors

Journals

citations
Cited by 2 publications
(2 citation statements)
references
References 11 publications
(12 reference statements)
0
2
0
Order By: Relevance
“…[ 78–80 ] A surface roughness of 5.7 nm in a 50 µm (diameter or width and height) microfluidic channel, for example, represents a relative roughness of ∼0.01%. Maintaining low surface roughness in microfluidics also has broader implications in facilitating reliable device bonding [ 47,81,82 ] and high optical clarity [ 83,84 ] in thermoplastics. Roughness analyses suggest that the limiting factor in achieving good molding reproduction of surface topography with surface roughness below 10 nm would depend on the roughness of the master mold and not on any roughness inherent to the material itself or resulting from the hot embossing process.…”
Section: Resultsmentioning
confidence: 99%
“…[ 78–80 ] A surface roughness of 5.7 nm in a 50 µm (diameter or width and height) microfluidic channel, for example, represents a relative roughness of ∼0.01%. Maintaining low surface roughness in microfluidics also has broader implications in facilitating reliable device bonding [ 47,81,82 ] and high optical clarity [ 83,84 ] in thermoplastics. Roughness analyses suggest that the limiting factor in achieving good molding reproduction of surface topography with surface roughness below 10 nm would depend on the roughness of the master mold and not on any roughness inherent to the material itself or resulting from the hot embossing process.…”
Section: Resultsmentioning
confidence: 99%
“…The result indicates that the maximum bonding strength (∼1.35 MPa) could be achieved with the UV exposure duration longer than 30 s. The time span needed for the UV exposure depends on the transmission of the thermoplastic substrate/cover plate in UV range as well as the thickness of the UV curable adhesives. The shear bonding strength achieved between glass plates by Jia et al is around 72.2 ± 4.1 MPa [31], and the shear bonding strength achieved between COP plates is around 15.7 MPa for COP‐based microfluidics [34].…”
Section: Resultsmentioning
confidence: 99%