Simultaneous fabrication of PDMS through-holes for three-dimensional microfluidic applications

Mosadegh, Bobak; Agarwal, Mayank; Torisawa, Yu-suke; Takayama, Shuichi

doi:10.1039/c003590d

Cited by 11 publications

(15 citation statements)

References 19 publications

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“…39 Compared to bonding methods [13][14][15] that achieve the same network complexity, this approach has high alignment accuracy between the fluidic channels on different levels. Sacrificial layer techniques require complicated UV-lithography methods 17 or hightemperature steps 18,19 that increase the process complexity compared to our strategy.…”

Section: Demonstration Of 3d Channel Networkmentioning

confidence: 99%

“…For example, the dimensions of fluidic through-holes (vias) need to be designed larger to compensate for the alignment tolerance. 15 However, for the miniaturization of the complete fluidic network, both fluidic vias as well as the fluidic channel network should be of equal dimensions.…”

Section: B Processing Of Fluidic Viasmentioning

confidence: 99%

“…Electronic mail: vlad.badilita@imtek.uni-freiburg.de. 14 In very recent publications 14,15 which report on PDMS multi-level microfluidics, this drawback remains unsolved. Fluidic networks are also realized in a sacrificial layer technique, where fluidic channels are the result of the selective removal of material from its surrounding medium.…”

Section: Introductionmentioning

confidence: 99%

“…This technique has been transferred to poly(dimethyl-siloxane) (PDMS), 5 poly-methyl-methacrylate (PMMA), 6,7 cyclic olefin copolymer (COC), 8 and SU-8 [9][10][11][12] photoresist. Complex multilevel fluidic devices in SU-8 12 and PDMS [13][14][15][16] have been achieved with the sequential stacking and bonding of multiple layers. These modular assembly techniques are rather time-consuming and difficult to control precisely.…”

Section: Introductionmentioning

confidence: 99%

“…The described method is accurate compared to PDMS multi-layer bonding 14,15 as multi-level fluidic chips with 25 lm alignment accuracy are fabricated. Our technique allows three fluidic levels compared to two fluidic levels using bonding techniques 9,12 and further achieves high substrate adhesion strength of 29 MPa.…”

Section: Introductionmentioning

confidence: 99%

See 4 more Smart Citations

Complex three-dimensional high aspect ratio microfluidic network manufactured in combined PerMX dry-resist and SU-8 technology

et al. 2011

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In this paper we present a new fabrication method that combines for the first time popular SU-8 technology and PerMX dry-photoresist lamination for the manufacturing of high aspect ratio three-dimensional multi-level microfluidic networks. The potential of this approach, which further benefits from wafer-level manufacturing and accurate alignment of fluidic levels, is demonstrated by a highly integrated three-level microfluidic chip. The hereby achieved network complexity, including 24 fluidic vias and 16 crossing points of three individual microchannels on less than 13 mm 2 chip area, is unique for SU-8 based fluidic networks. We further report on excellent process compatibility between SU-8 and PerMX dryphotoresist which results in high interlayer adhesion strength. The tight pressure sealing of a fluidic channel (0.5 MPa for 1 h) is demonstrated for 150 lm narrow SU-8/PerMX bonding interfaces.

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Section: Demonstration Of 3d Channel Networkmentioning

confidence: 99%

Section: B Processing Of Fluidic Viasmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Complex three-dimensional high aspect ratio microfluidic network manufactured in combined PerMX dry-resist and SU-8 technology

et al. 2011

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Three-dimensional on-chip continuous-flow polymerase chain reaction employing a single heater

Lee²

2011

Anal Bioanal Chem

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Multi-step temperature control in a polymerase chain reaction (PCR) is a limiting factor in device miniaturization and portability. In this study, we propose the fabrication of a three-dimensional (3D) microdevice employing a single heater to minimize temperature control required for an on-chip continuous-flow PCR as well as the overall footprint by stacking the device in multi-layers. Two poly(dimethylsiloxane) (PDMS) layers with differing thicknesses are vertically stacked with their microchannel-engraved sides facing down. Through-holes are made in the thicker PDMS layer, which is sandwiched between a glass substrate at the bottom and the thinner PDMS layer at the top. In this way, a fluidic conduit is realized in a 3D configuration. The assembled 3D microdevice is then placed onto a heater glass-side down. The interface of the two PDMS layers displays a relatively lower temperature than that of the PDMS and glass layers due to the low thermal conductivity of the PDMS and its physical distance from the heater. The denaturation temperature can be controlled by adjusting the temperature of the heater, while the annealing/extension temperature can be controlled automatically by molding the thicker bottom PDMS layer into the appropriate thickness calculated using a numerical derivation proposed in this study. In this way, a cumbersome temperature measurement step is eliminated. DNA amplification was successfully carried out using the proposed 3D fluidic microdevice, and the intensity of the resulting amplicon was comparable to that obtained using a thermal cycler. This novel concept of adopting a single heating source greatly simplifies the temperature control issue present in an on-chip continuous-flow PCR. It also allows the use of a commercialized hot plate as a potential heat source, paving the way for device miniaturization and portability in a highly cost-effective manner. In this study, a simple and facile technique to make arrays of through-holes for the fluidic interconnection inside a 3D channel configuration is also addressed.

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Microfluidic concentration-on-demand combinatorial dilutions

Lee

Kim

et al. 2011

Microfluid Nanofluid

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We present a microfluidic network-based combinatorial dilution device to generate on-demand combinatorial dilutions of all input samples in the range of a 3D simplex-centroid. The device consists of an initial concentration control module and a combinatorial dilution module. In the initial concentration control module, the concept of using a single common channel has been incorporated to generate desirable concentrations of each sample, diluted independently in response to variable input flow. Then, the diluted samples flow into the combinatorial dilution module to generate a full set of seven combinations from the three samples. First, we investigated the performance of the initial concentration controller by computational simulation (CFD-ACE ? ). The simulated output concentrations are extremely close to the expected theoretical values. Further, a PDMS-based initial concentration controller was fabricated, and its linearity and independency were tested with fluorescent dye. Then, we designed, simulated, and tested a combinatorial dilution device integrated with the initial concentration controller. Finally, as proof-of-concept, we performed a simple combinatorial cytotoxicity test with three drugs (Mitomycin C, Doxorubicin, and 5-FU) for MCF-7 cancer cells.

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Simultaneous fabrication of PDMS through-holes for three-dimensional microfluidic applications

Cited by 11 publications

References 19 publications

Complex three-dimensional high aspect ratio microfluidic network manufactured in combined PerMX dry-resist and SU-8 technology

Complex three-dimensional high aspect ratio microfluidic network manufactured in combined PerMX dry-resist and SU-8 technology

Three-dimensional on-chip continuous-flow polymerase chain reaction employing a single heater

Microfluidic concentration-on-demand combinatorial dilutions

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