Simulations of surface acoustic wave devices built on stratified media using a mixed finite element/boundary integral formulation

Abstract

Responses of partially immersed elastic structures using a symmetric formulation for coupled boundary element and finite element methods

Guided wave propagation in multilayered piezoelectric structures

“…Numerous ultrasonic devices, based on either surface acoustic wave (SAW) or bulk acoustic wave (BAW), have been developed using piezoelectric materials for a variety of applications [2,3] . These devices are usually fabricated with a layered geometry, because of its high sensitivity, great bandwidth, and enhanced reception characteristics [4][5][6][7][8][9][10][11] . Currently, in order to satisfy the increasing demand of higher frequency, higher performance, smaller size, lower cost and lower energy consumption, thin film piezoelectric stack structures are widely used with the maturation of thin film technologies.…”

“…For the sake of design and optimization, appropriate theoretical models and efficient solution methods are desired to investigate the behaviors of wave propagation in these devices. It is common to use layered model consisting of piezoelectric and non-piezoelectric layers stacked in a certain sequence for these piezoelectric devices [4][5][6][7][8][9][10][11][12][13] . So far, various matrix analysis methods have been proposed in the study of wave propagation in multilayered piezoelectric structures [1][2][3][4][5][6][7][8][9][10][11][12][15][16][17][18][19][20][21][22][23][24][25][26][27] , such as the finite element method (FEM) [4,10] , the transfer matrix method (TMM) [1][2][3]15,16] , the scattering-matrix method [8] , the surface impedance matrix method [9,17,18] , the compound matrix me...…”

High temperature chemical vapor deposition of aluminum nitride, growth and evaluation

“…The chemical and physical properties of aluminum nitride have made it attractive for a wide range of applications in optoelectronics, including UV Light Emitting Diodes (UV LED) [1][2][3], thin film dielectrics, protective coatings [4,5], surface acoustic wave devices (SAW) [6,7] and high power electronics (High Electron Mobility Transistors) [8]. AlN is a good electrical insulator with a direct wide band gap of 6.2 eV.…”

Precise Analysis and Design of Multi-Layered Acoustic Wave Devices with Bragg Cell

“…The reason is that the wave media should be modeled by tremendous elements of small size to ensure computational convergence. Analytical-numerical mixed methods, such as the finite element method/boundary integral formulation (FEM/BIF) (Ballandras et al, 2004) and the finite element method/spectral domain analysis (FEM/SDA) (Hashimoto et al, 2009;Naumenko, 2010), are usually powerful for modeling both the small-sized accessories and the largedimensioned wave media with high accuracy. They seem to be promising as long as the uniformity of their formulation is improved (Hashimoto et al, 2009;Naumenko, 2010).…”