“…S1 [2,3,[7][8][9]. In this report, two-layered rectangles are analyzed by CSDaVe, in addition to conventional ellipses, rectangles, and triangles [10][11][12]. At a minimum, CSDaVe's analysis is possible if the diffraction pattern can be calculated by RCWA without simulator power issues, and it can be assumed that the shape is one of these structures.…”