Simulation of the deposition process in PVD-technology

Knotek, O.; Lugscheider, E.; Barimani, C.; Eckert, P.; Hayn, G. von

doi:10.1016/s0927-0256(96)00074-2

Cited by 2 publications

(1 citation statement)

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“…Oxygen atoms will diffuse into the coatings to form the cavity, which results in premature failure of the coatings [4,5]. In order to overcome the deficiency of binary coating, researchers have developed multielement coatings including TiSiC, Ti(CN), TiSiN and TiSiCN [6][7][8]. The structure of TiSiC coating is similar to graphite and this plays an important role in developing tribological performance in abrasion [9][10][11][12][13].…”

Section: Introductionmentioning

confidence: 99%

Structure and properties of TiSiCN coatings with different bias voltages by arc ion plating

Xie

Dong

et al. 2018

Surf. Topogr.: Metrol. Prop.

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TiSiCN coatings were deposited on 316 L steel using the multi-arc ion plating system. All the coatings had the same total thickness of approximately 1.6 µm. The TiSiCN coatings were deposited under the mixture constant flow of N 2 and C 2 H 2 but varying bias. Information about structures, composition and properties were characterized by scanning electron microscope, x-ray diffraction, x-ray photoelectron spectroscopy, nanoindentation and ball-on-plate wear tests. The results show that all of the coatings consist of a TiCN nano-crystal phase and an Si 3 N 4 amorphous phase. With an increase in the bias, the film becomes denser and exhibits better tribological behavior and mechanical properties. Moreover, the bonding strength between the coatings and the substrate increased and the resistance to thermal shock intensified when the coatings were made at a higher bias voltage.

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