2004
DOI: 10.1016/j.surfcoat.2003.08.066
|View full text |Cite
|
Sign up to set email alerts
|

Plasma diagnostics as a tool for the modeling and simulation of sputter processes

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2

Citation Types

0
2
0

Year Published

2006
2006
2011
2011

Publication Types

Select...
2

Relationship

1
1

Authors

Journals

citations
Cited by 2 publications
(2 citation statements)
references
References 14 publications
0
2
0
Order By: Relevance
“…The heat transfer boundary conditions have to be changed due to the moving jet as well as the boundary elements themselves due to the coating formation. [48] _ q hT ∞ À T S 13 _ q Àk ∂T=∂n contact surface 14…”
Section: Coating Formation Simulationmentioning
confidence: 99%
See 1 more Smart Citation
“…The heat transfer boundary conditions have to be changed due to the moving jet as well as the boundary elements themselves due to the coating formation. [48] _ q hT ∞ À T S 13 _ q Àk ∂T=∂n contact surface 14…”
Section: Coating Formation Simulationmentioning
confidence: 99%
“…The Nusselt number of the heat transfer inside the action radius of the plasma jet is calculated from an approach presented by Gnielinski. [45,48] The Nusselt number is composed of a minimum (Nu min ), a laminar (Nu lam ) and a turbulent part (Nu turb ),(Eq. 16).…”
Section: Coating Formation Simulationmentioning
confidence: 99%