Simulation of Piezoelectric Tube Actuators by Reduced Finite Element Models for Controller Design

Maess, Johannes; Fleming, Andrew J.; Allgöwer, Frank

doi:10.1109/acc.2007.4282690

Cited by 4 publications

(3 citation statements)

References 15 publications

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“…The dynamic analysis of the piezoelectric tube in [19] is extended to the tube assembly in the present article. The fully-coupled structural and piezoelectric domains are described by the constitutive equations of the direct and indirect piezoelectric effects…”

Section: A Finite Element Analysismentioning

confidence: 99%

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Model-based vibration suppression in piezoelectric tube scanners through induced voltage feedback

Maess

Fleming

Allgöwer

2008

2008 American Control Conference

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The operation speed and tracking accuracy of piezoelectric tube actuators in scanning probe microscopy is significantly reduced due to the excitation of the scanner eigenfrequencies by the driving voltages. Feedback control is a suitable method for vibration suppression but suffers from the required additional sensor equipment and high cost for generation of a displacement feedback signal. Operating the piezotube in single-electrode excitation mode allows the comparatively uncomplex measurement of the induced voltages at sensor electrodes. The Finite Element (FE) approach enables an accurate modeling of the voltage signals. Furthermore, geometrical details included in the dynamic FE-model are the sample mass attached to the top of the tube as well as tube eccentricity and dislocated electrodes. Additionally, the FEmodel accounts for dynamics-coupling effects along the separate axes of the three-dimensional tube motion. Comparison with experimental data demonstrates the accuracy of the FE-model. The controller employing the induced voltage as a feedback signal is designed by means of a reduced order model obtained from modal truncation. The efficacy of the controller is illustrated by closed-loop simulations.

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Section: A Finite Element Analysismentioning

confidence: 99%

“…I quantifies the influence of the sample mass on the change of the eigenfrequencies of the tube assembly in comparison to the piezoelectric tube without sample mass [19]. The eigenfrequencies and the mode shape classification for the case without sample mass are given by the expressions in brackets in Tab.…”

Section: A Finite Element Analysismentioning

confidence: 99%

Model-based vibration suppression in piezoelectric tube scanners through induced voltage feedback

Maess

Fleming

Allgöwer

2008

2008 American Control Conference

Self Cite

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show abstract

“…This static approach is extended by Sun and Wolkow (2006) to a tube assembly taking the sample holder into account. In (Maess et al (2007)), a dynamic analysis of the piezoelectric tube is carried out and is generalized to the tube assembly in the following making use of finite-element (FE) discretization and a modal reduction approach. The direct and indirect piezoelectric effects couple the structural and piezoelectric domains as described by the constitutive equations in stress-charge representation…”

Section: Finite-element Model Of the Piezoelectric Tube Scannermentioning

confidence: 99%