A Review of Piezoelectric Design in MEMS Scanner

Rahim, Nur Azirah Abdul; Azid, Ishak Abdul; Koay, Loke Kean

doi:10.1007/978-3-319-72697-7_48

Cited by 3 publications

(3 citation statements)

References 36 publications

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“…Piezoelectric actuation is another approach that is used in the design of MEMS-based micro mirror imaging, which leverages the piezoelectric effect to induce bending motion by applying an electric field across a piezoelectric material such as lead zirconate titanate (PZT). Piezoelectric actuators typically consist of a sandwich structure of metal/PZT/metal or double-layered PZT materials [41][42][43][44][45][46][47][48][49][50][51][52] . In a reported study 76 , a piezoelectric MEMS-based OCT probe was developed.…”

Section: Discussionmentioning

confidence: 99%

“…MEMS scanning micromirrors can be implemented using a variety of actuation methods, including electrostatic [33][34][35] , electromagnetic 3,36,37 , electrothermal [38][39][40] and piezoelectric [41][42][43][44][45][46][47][48][49][50][51][52] designs. Electrostatic actuators are relatively easy to fabricate and offer straightforward actuation but require higher driving voltages to compensate for their low actuation force.…”

Section: Introductionmentioning

confidence: 99%

“…Electrothermal actuators offer improved optical performance and have simpler fabrication methods that are compatible with integrated circuit (IC) processes, but they are also dependent on the ambient temperature and may require relatively large operating voltages or currents. Piezoelectric actuators strike a balance between compact design and low power/ low voltage actuation, while offering the advantage of high dielectric strength [41][42][43][44][45][46][47][48][49][50][51][52] . However, piezoelectric actuator fabrication can be complicated, typically relying on techniques such as sol-gel, chemical vapor deposition, granule spray in vacuum, aerosol deposition or sputtering [53][54][55][56][57][58][59][60][61][62][63][64][65][66] .…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Mirrorless MEMS imaging: a nonlinear vibrational approach utilizing aerosol-jetted PZT-actuated fiber MEMS scanner for microscale illumination

Wang,

Li,

Peng

et al. 2024

Microsyst Nanoeng

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This study introduces a novel image capture and lighting techniques using a cutting-edge hybrid MEMS scanner system designed for compact microscopic imaging. The scanner comprises a tapered optical fiber waveguide and innovative aerosol-jet printed PZT (lead zirconate titanate) bimorph push-pull actuators on a stainless-steel substrate, effectively addressing issues that are commonly associated with PZT on silicon substrates such as fracture and layer separation. By leveraging nonlinear vibration, the scanner achieves a spiral scan pattern from a single signal input, in addition to the expected two-dimensional scanning and target illumination from two phase-shifted inputs. This capability is further enhanced by a novel process to taper the optical fiber, which reduces illumination scattering and tunes the fiber to the resonant frequencies of the scanner. The precisely tapered tip enables large fields of view while maintaining independent 2-axis scanning through one-degree-of-freedom actuation. Experimental validation showcases the successful generation of a spiral scan pattern with a 60 μm diameter scan area and a 10 Hz frame rate, effectively reconstructing scanned images of 5 μm lines, cross patterns (15 μm in length with a 5 μm gap), and structures of a Psychodidae wing.

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Section: Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Mirrorless MEMS imaging: a nonlinear vibrational approach utilizing aerosol-jetted PZT-actuated fiber MEMS scanner for microscale illumination

Wang,

Li,

Peng

et al. 2024

Microsyst Nanoeng

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Modeling Material Nonlinearities in Piezoelectric Films: Quasi-Static Actuation

Opreni

Boni

Mendicino

et al. 2021

2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)

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Design and development of 1D torsional spring resonant scanner

Lim

Teh

Yew

2023

JME

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This paper presents the design and dynamic response of a proposed non- Micro-Electro Mechanical Systems (MEMS) 1D torsional spring resonant scanner. The torsional spring was selected as the compliant structure of the device, and it was fabricated using aluminum with dimensions of 49 x 3.50 x 0.18 mm (L x W x T). An Analysis of Variance (ANOVA) test was performed to determine the difference in mean between the operating resonant frequency and the three types of materials, which are aluminum, stainless steel, and carbon steel. The device operates at a resonant frequency of 80.65 Hz, yielding a maximum scanning angle of 58.06 ˚. Hysteresis was observed from the frequency response chart of the system. By comparing the resonant frequency of the experimental results with the dynamic analysis of this device, the percentage error of the resonant frequency and optical scanning angle was found to be 6.67% and 16.84%, respectively.

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A Review of Piezoelectric Design in MEMS Scanner

Cited by 3 publications

References 36 publications

Mirrorless MEMS imaging: a nonlinear vibrational approach utilizing aerosol-jetted PZT-actuated fiber MEMS scanner for microscale illumination

Mirrorless MEMS imaging: a nonlinear vibrational approach utilizing aerosol-jetted PZT-actuated fiber MEMS scanner for microscale illumination

Modeling Material Nonlinearities in Piezoelectric Films: Quasi-Static Actuation

Design and development of 1D torsional spring resonant scanner

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