2006
DOI: 10.1088/0963-0252/15/4/012
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Simulation of dc atmospheric pressure argon micro glow-discharge

Abstract: A hybrid model was used to simulate a dc argon micro glow-discharge at atmospheric pressure. The simulations were carried out for a pin-plate electrode configuration with inter-electrode gap spacing of 200 µm together with an external circuit. The predicted voltage-current characteristics and current density profiles identify the discharge to be a normal glow-discharge. The neutral gas temperature predictions indicate that the discharge forms a non-thermal, non-equilibrium plasma. Experimental studies were con… Show more

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Cited by 101 publications
(75 citation statements)
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“…The thickness of the anode sheath is found to be 77 -90 µm for d = 1 -3 mm, whereas the anode sheath is not fully formed for the d = 0.5 mm case. For d ≥1mm, the thickness of the anode sheath is 16 -20% of that of the cathode sheath, consistent with literature data [47]. Using the space-averaged rms electric field to approximate the anode electric field, the drift distances of anions are found to be L O-= 5 -17 μm, L O2-= 4 -12 μm and L O3-= 10 -33 μm with larger drift distance found at smaller electrode gap.…”
Section: Wall Fluxes Of Key Plasma Speciessupporting
confidence: 87%
“…The thickness of the anode sheath is found to be 77 -90 µm for d = 1 -3 mm, whereas the anode sheath is not fully formed for the d = 0.5 mm case. For d ≥1mm, the thickness of the anode sheath is 16 -20% of that of the cathode sheath, consistent with literature data [47]. Using the space-averaged rms electric field to approximate the anode electric field, the drift distances of anions are found to be L O-= 5 -17 μm, L O2-= 4 -12 μm and L O3-= 10 -33 μm with larger drift distance found at smaller electrode gap.…”
Section: Wall Fluxes Of Key Plasma Speciessupporting
confidence: 87%
“…Negative potential is applied to the bar, the plane electrode is grounded as zero potential, and the zero charge boundary conditions [34] Within numerical model, the bar-plate electrode system model is simplified into a two-dimensional representation using the rotational symmetry. The computational domain is highlighted with green in Fig.…”
Section: Boundary Conditions and Computational Implementationmentioning
confidence: 99%
“…Typical drawbacks of low pressure plasma discharge are the necessity of vacuum pumps, low rate of deposition or etching for CVD techniques and size restriction [1][2][3][4]. The non-thermal micro plasma devices also has an increasing trends of application in biomedical applications [5,6], thin film deposition [7] and surface treatment [8,9].…”
Section: Introductionmentioning
confidence: 99%