2004
DOI: 10.1016/j.ces.2003.05.010
|View full text |Cite
|
Sign up to set email alerts
|

Simulation of aerosol dynamics and transport in chemically reacting particulate matter laden flows. Part II: Application to CVD reactors

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

0
9
0

Year Published

2006
2006
2020
2020

Publication Types

Select...
10

Relationship

3
7

Authors

Journals

citations
Cited by 21 publications
(9 citation statements)
references
References 30 publications
0
9
0
Order By: Relevance
“…For example, the distance particles with diameters of 3-50 nm travel in 1 s by diffusion is in range of 1.2 mm (3 nm particles) to 0.07 mm (50 nm particles) and by thermophoresis with a temperature gradient of 247 K/0.01 m the distance is »1 mm for particle less than about 50 nm (temperature gradient due to difference in nozzle and ambient air temperature, see SI section S5 for details). Thermophoretic force might affect the particle tracks (Kommu et al 2004) and previous model results showed »40% increase in aerosol diffusional deposition rates onto surfaces when considering thermophoresis at high temperature (Bai and Biswas 1990). This indicates the small aerosols (e.g., <50 nm) might be collected by a combination of diffusion and thermophoresis before they grow and are advected out of the control volume.…”
Section: Discussionmentioning
confidence: 91%
“…For example, the distance particles with diameters of 3-50 nm travel in 1 s by diffusion is in range of 1.2 mm (3 nm particles) to 0.07 mm (50 nm particles) and by thermophoresis with a temperature gradient of 247 K/0.01 m the distance is »1 mm for particle less than about 50 nm (temperature gradient due to difference in nozzle and ambient air temperature, see SI section S5 for details). Thermophoretic force might affect the particle tracks (Kommu et al 2004) and previous model results showed »40% increase in aerosol diffusional deposition rates onto surfaces when considering thermophoresis at high temperature (Bai and Biswas 1990). This indicates the small aerosols (e.g., <50 nm) might be collected by a combination of diffusion and thermophoresis before they grow and are advected out of the control volume.…”
Section: Discussionmentioning
confidence: 91%
“…In recent years, based on the developments along different lines described above, successful attempts have been made in using simulation not only to optimize hydrodynamic reactor design and eliminate flow recirculations [77,85] and to predict and optimize deposition rate and uniformity [74,78,131,132], but also to optimize temperature uniformity [47,133], to predict and control formation and transport of particles [134,135], to scale-up existing reactors to larger wafer diameters [136,137], to optimize processing conditions with respect to deposition conformality [52], to predict the influence of process conditions on doping rates [138], to evaluate loading effects on selective deposition rates [15], to study the influence of operating conditions on selectivity loss [123], etc. Also, some studies have been performed that apply transport phenomena modeling to study and optimize the use of CVD in the manufacture of coated powder particles [139,140].…”
Section: Cvd Simulation Models: a Literature Reviewmentioning
confidence: 99%
“…The route of particle formation for the different precursor feed conditions was simulated. Later, the discrete-model was successfully applied in modeling an ACVD reactor to simulate the particle formation and deposition. , In addition, Gao et al (2017) used this model to simulate the ultrafine particle formation in a high sodium lignite combustion reactor. Further, Dhamale et al (2018) coupled the discrete-section model with CFD to study the nucleation and growth of Y 2 O 3 nanoparticles in a thermal plasma reactor.…”
Section: Multiscale Simulations For Aerosol Reactor Systemmentioning
confidence: 99%