Simulation of a Love wave device with ZnO nanorods for high mass sensitivity

Trivedi, Shyam; Nemade, Harshal B.

doi:10.1016/j.ultras.2017.10.004

Cited by 13 publications

(7 citation statements)

References 44 publications

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“…At a critical height of nanorods, both SiO 2 /ST-90 • X quartz substrate and PIB nanorods vibrate in unison causing a transition from inertial loading to elastic loading and leading to a sharp swing in frequency shift, that is, the coupled resonance. [16] In our case, the first two mode transitions occur at the PIB nanorods height of 500 nm, and 1220 nm, respectively, and the frequency shifts caused by the coupled resonance are 66.22 MHz and 68.38 MHz, respectively. And the typical vibration displacements of mode 0, mode 1 and mode 2 of Love wave are also presented in Fig.…”

Section: Resonance Frequencymentioning

confidence: 55%

“…[15] The analysis of insertion loss (IL) of the novel SAW sensor based on the new P-matrix model revealed that this design had excellent performance after the parametric optimization. Trivedi et al [16] presented the 3D finite element simulation and analysis of Love wave resonator with different guiding layer materials and investigation of high mass sensitivity caused by the coupled resonance effect with ZnO nanorods on the device surface. On the other hand, Love wave devices have been experimentally demonstrated as sensors for the detection of humidity, [11] gas, [17,18] organic compounds, [19] bacteria, [20] viruses, [21] proteins and immunoglobulins.…”

Section: Introductionmentioning

confidence: 99%

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Finite element simulation of Love wave sensor for the detection of volatile organic gases

Wang¹,

Liang²,

Shang³

et al. 2022

Chinese Phys. B

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The 3D finite element (3D-FE) simulation and analysis of Love wave sensors based on PIB layers/SiO2/ST-90°X quartz structure, as well as the investigation of coupled resonance effect on the acoustic properties of the devices, are presented in this paper. The mass sensitivity of the basic Love wave device with SiO2 guiding layers solved analytically. And the highest mass sensitivity of 128 m2/kg is obtained as h s/λ =0.175. The sensitivity of the Love wave sensors for sensing VOCs is greatly improved due to the presence of coupled resonance induced by the PIB nanorods on the device surface. The frequency shifts of the sensor corresponding to CH2Cl2, CHCl3, CCl4, C2Cl4, CH3Cl and C2HCl3 with the concentration of 100 ppm are 1.431 kHz, 5.507 kHz, 13.437 kHz, 85.948 kHz, 0.127 kHz and 17.879 kHz, respectively. The viscoelasticity influence of sensitive material on the characteristics of SAW sensors is also studied. Taking account of the viscoelasticity of PIB layers, the sensitivities of SAW sensors with the PIB film and PIB nanorods decay in different degree. The gas sensing property of Love wave sensor with PIB nanorods is superior to that of the PIB films. Meanwhile, the Love wave sensors with PIB sensitive layers show good selectivity to C2Cl4, making it an ideal selection for gas sensing applications.

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Section: Resonance Frequencymentioning

confidence: 55%

Section: Introductionmentioning

confidence: 99%

Finite element simulation of Love wave sensor for the detection of volatile organic gases

Wang¹,

Liang²,

Shang³

et al. 2022

Chinese Phys. B

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“…Experiments and simulations of microcavity-based SH SAW delay line devices for investigation concerning mass sensitivity, improvement in insertion loss, and enhancement in power efficiency of the devices was also reported by various authors [24,25]. FE simulations have been extensively used for calculation of the mass sensitivity of LW and SH-SAW devices in [26][27][28][29].…”

Section: Saw Devicementioning

confidence: 99%

“…The centre-to-centre separation L between the input and output IDTs is 5λ. SiO 2 guiding layer with normalised thickness h/λ = 0.39 is made on the 36°-YX LiTaO 3 substrate, a configuration which corresponds to a maximum mass sensitivity [28]. ZnO nanorods of the square cross-section of size 100 nm with the height varying from 350 to 1400 nm are designed on the delay line path length D = 39 μm.…”

Section: Device Structurementioning

confidence: 99%

ZnO nanorod‐based Love wave delay line for high mass sensitivity: a finite element analysis

Trivedi

Nemade

2019

IET Science, Measurement & Technology

Self Cite

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“…The Love wave humidity sensor requires that the shear velocities and densities of the waveguide layer materials are smaller than those of the piezoelectric substrate materials, and the waveguide layer materials were required to have good elastic properties and weak acoustic wave absorption performance [ 11 , 12 , 13 ]. At present, some materials can be used as a waveguide layer of the Love wave device, such as polyimide (PI), poly methyl methacrylate (PMMA), silicon dioxide (SiO 2 ) and zinc oxide (ZnO) [ 14 , 15 , 16 , 17 ]. In these materials, ZnO is a kind of piezoelectric material with positive temperature coefficient, which can improve the electromechanical coupling performance, the conversion efficiency, and the temperature characteristics of the Love wave humidity sensor.…”

Section: Introductionmentioning

confidence: 99%

Study on Fabrication of ZnO Waveguide Layer for Love Wave Humidity Sensor Based on Magnetron Sputtering

Wen

Niu

et al. 2018

Sensors

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The ZnO waveguide layer for the Love wave humidity sensor was fabricated by radio frequency (RF) magnetron sputtering technique using ZnO as the target material. To investigate the effect of RF magnetron sputtering temperature on the ZnO waveguide layer and Love wave device, a series of Love wave devices with ZnO waveguide layer were fabricated at different sputtering temperatures. The crystal orientation and microstructure of ZnO waveguide was characterized and analyzed, and the response characteristics of the Love wave device were analyzed by network analyzer. Furthermore, a humidity measurement system is designed, and the performance of the Love wave humidity sensor was measured and analyzed. The research results illustrate that the performance of the ZnO waveguide layer is improved when the sputtering temperature changes from 25 °C to 150 °C. However, when the sputtering temperature increases from 150 °C to 200 °C, the performance of the ZnO waveguide layer is degraded. Compared with the other sputtering temperatures, the ZnO waveguide layer fabricated at 150 °C has the best c-axis orientation and the largest average grain size (53.36 nm). The Love wave device has the lowest insertion loss at 150 °C. In addition, when the temperature of the measurement chamber is 25 °C and the relative humidity is in the range of 10% to 80%, the fabricated Love wave humidity sensor with ZnO waveguide layer has good reproducibility and long-term stability. Moreover, the Love wave humidity sensor has high sensitivity of 6.43 kHz/RH and the largest hysteresis error of the sensor is 6%.

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Simulation of a Love wave device with ZnO nanorods for high mass sensitivity

Cited by 13 publications

References 44 publications

Finite element simulation of Love wave sensor for the detection of volatile organic gases

Finite element simulation of Love wave sensor for the detection of volatile organic gases

ZnO nanorod‐based Love wave delay line for high mass sensitivity: a finite element analysis

Study on Fabrication of ZnO Waveguide Layer for Love Wave Humidity Sensor Based on Magnetron Sputtering

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