Abstract:The 3D finite element (3D-FE) simulation and analysis of Love wave sensors based on PIB layers/SiO2/ST-90°X quartz structure, as well as the investigation of coupled resonance effect on the acoustic properties of the devices, are presented in this paper. The mass sensitivity of the basic Love wave device with SiO2 guiding layers solved analytically. And the highest mass sensitivity of 128 m2/kg is obtained as h
s/λ =0.175. The sensitivity of the Love wave sensors for sensing VOCs is … Show more
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