Simulation, Fabrication, and Characterization of a Sensitive SU-8-Based Fabry-Pérot MOEMS Accelerometer

Taghavi, Majid; Latifi, Hamid; Parsanasab, Gholam-Mohammad; Abedi, Abolfazl; Nikbakht, Hamed; Sharifi, Mohammad Javad

doi:10.1109/jlt.2019.2894752

Cited by 20 publications

(8 citation statements)

References 28 publications

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“…For free-space FP accelerometers, Perez and Eklund et al designed a high-resolution micromachined accelerometer (Figure 6a) that achieved a bandwidth of 1 kHz and a resolution of 2.4 ng, based on the optimization of the relevant factors such as noise, reflectivity, surface roughness, and parallelism that affect the performance of FP MEMS accelerometers. [24][25][26][27] Zhao et al adopted 3D printing technology to fabricate an integrated FP MEMS accelerometer [15] and then optimized the crosssensitivity of the sensing structure (Figure 6b)to 0.004%. [28] To reduce the noise of the accelerometer, the team systematically analyzed the primary noise sources of the accelerometer and reduced the sensor noise from 11 μg Hz −1/2 to 330 ng Hz −1/2 through the modulation and demodulation techniques.…”

Section: Fabry-perot Accelerometermentioning

confidence: 99%

Optical Interferometric MEMS Accelerometers

Zhao,

Qi,

Wang

et al. 2023

Laser & Photonics Reviews

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Laser interferometry is one of the most accurate measurement technologies whose displacement resolution can reach the femtometer (fm) level. With the development of Micro‐Electro‐Mechanical Systems(MEMS) technology, many excellent optical interferometric MEMS sensors have emerged, which play an essential role in intelligent manufacturing, aerospace, and many other fields. Among them, optical interferometric MEMS accelerometers develop rapidly due to their high sensitivity, low noise, and anti‐electromagnetic interference advantages. Lots of research in optical interferometric chip design, micro‐nano fabrication process, signal demodulation algorithm, and range extension technology are performed, and different types of MEMS accelerometers based on the optical interferometric principles are developed, which have been demonstrated and applied in the fields of disaster monitoring, equipment operation and maintenance, and resource exploration. This paper reviews the development status of optical interferometric MEMS accelerometers, mainly focusing on the critical problems and solutions that need to be solved in the development process of optical interferometric accelerometers, and finally introduces the typical application scenarios.

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Section: Fabry-perot Accelerometermentioning

confidence: 99%

Optical Interferometric MEMS Accelerometers

Zhao,

Qi,

Wang

et al. 2023

Laser & Photonics Reviews

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“…where P represent external force or pressure, E is the Young's modulus of the fiber, L is the length of the cantilever beam, J is the inertia moment. It is known that the intensity distribution of the fundamental mode of a single mode fiber can be approximated by a Gaussian field distribution [11]- [13]. When the end face of the emitting fiber is a flat plane shown in Fig.…”

Section: Theory Analysismentioning

confidence: 99%

Low-Cost Fiber Optic Cantilever Accelerometer With a Spherical Tip Based on Gaussian Beam Focusing

Hong

Chen

et al. 2021

IEEE Photonics J.

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We propose and demonstrate a low-cost and simple fiber optic cantilever accelerometer with a spherical tip based on Gaussian beam focusing. The accelerometer consists of ceramic ferrule, ceramic sleeve, receiving fiber and emitting fiber, where both fibers are single mode fiber, the ferrule and sleeve have characteristics of high precision, which reduce the difficulty of optical alignment. The end of the emitting fiber is made into a spherical tip for focusing the Gaussian beam to improve sensitivity. When the accelerometer is in operation, the emitting fiber acts as a cantilever beam, the acceleration can be measured by detecting the transmission power. Further, our experimental results show that the spherical fiber tip can improve the acceleration sensitivity by 67% over 10 Hz -1000 Hz without reducing the working bandwidth. In addition, it is found that the fiber accelerometer has a high signal-to-noise ratio (SNR) up to 60 dB, and a low harmonic distortion of better than -30 dB, rendering a quasi-8-shaped directionality at the working frequency ranging from 10 Hz to 1200 Hz. This clever sensor structure may have potentials for developing high-performance and cost-effective accelerometers and hydrophones.

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“…In the wave-optics-based accelerometers, the acceleration alters the parameters of the light flux (phase, frequency, intensity, etc.). MOEM-accelerometers based on wave optics are tunnel, grating or interferometric resonators [22][23][24], Fabry-Perot resonators [25][26][27][28], photon crystals [29][30][31] and others. At present, MOEM-accelerometers based on the fiber Bragg grating (FBG) with direct integration into optical fiber are widely used [32][33][34][35].…”

Section: Introductionmentioning

confidence: 99%

An Optical Measuring Transducer for a Micro-Opto-Electro-Mechanical Micro-g Accelerometer Based on the Optical Tunneling Effect

et al. 2023

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Micro-opto-electro-mechanical (MOEM) accelerometers that can measure small accelerations are attracting growing attention thanks to their considerable advantages—such as high sensitivity and immunity to electromagnetic noise—over their rivals. In this treatise, we analyze 12 schemes of MOEM-accelerometers, which include a spring mass and a tunneling-effect-based optical sensing system containing an optical directional coupler consisting of a fixed and a movable waveguide separated by an air gap. The movable waveguide can perform linear and angular movement. In addition, the waveguides can lie in single or different planes. Under acceleration, the schemes feature the following changes to the optical system: gap, coupling length, overlapping area between the movable and fixed waveguides. The schemes with altering coupling lengths feature the lowest sensitivity, yet possess a virtually unlimited dynamic range, which makes them comparable to capacitive transducers. The sensitivity of the scheme depends on the coupling length and amounts to 11.25 × 103 m−1 for a coupling length of 44 μm and 30 × 103 m−1 for a coupling length of 15 μm. The schemes with changing overlapping areas possess moderate sensitivity (1.25 × 106 m−1). The highest sensitivity (above 6.25 × 106 m−1) belongs to the schemes with an altering gap between the waveguides.

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Simulation, Fabrication, and Characterization of a Sensitive SU-8-Based Fabry-Pérot MOEMS Accelerometer

Cited by 20 publications

References 28 publications

Optical Interferometric MEMS Accelerometers

Optical Interferometric MEMS Accelerometers

Low-Cost Fiber Optic Cantilever Accelerometer With a Spherical Tip Based on Gaussian Beam Focusing

An Optical Measuring Transducer for a Micro-Opto-Electro-Mechanical Micro-g Accelerometer Based on the Optical Tunneling Effect

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