2017 14th China International Forum on Solid State Lighting: International Forum on Wide Bandgap Semiconductors China (SSLChina 2017
DOI: 10.1109/ifws.2017.8245995
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Simulation, fabrication and characterization of 6500V 4H-SiC power DMOSFETs

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Cited by 8 publications
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“…According to previous studies on the breakdown principle of VDMOS, we can know that when the device is break-down, the current mainly appears in the P+ region of P-well due to the existence of PN junction between the source and P-well. [13] Because the polysilicon region in SiC GCBTP is a high-doping concentration, and the blocking effect on carrier motion is not as strong as that of PN junction, the breakdown mechanism of SiC GCBTP is the same as that of traditional SiC VDMOS. For this reason, SiC GCBTP has the same high breakdown voltage as SiC VDMOS.…”
Section: Device Structure and Descriptionmentioning
confidence: 99%
“…According to previous studies on the breakdown principle of VDMOS, we can know that when the device is break-down, the current mainly appears in the P+ region of P-well due to the existence of PN junction between the source and P-well. [13] Because the polysilicon region in SiC GCBTP is a high-doping concentration, and the blocking effect on carrier motion is not as strong as that of PN junction, the breakdown mechanism of SiC GCBTP is the same as that of traditional SiC VDMOS. For this reason, SiC GCBTP has the same high breakdown voltage as SiC VDMOS.…”
Section: Device Structure and Descriptionmentioning
confidence: 99%
“…And The breakdown mechanism of SiC GCBT is basically the same as that of SiC IGBT and SiC VDMOS in principle, because the gate, source and base are all short-circuited and grounded when turned off. And the high Vth of SiC VDMOS [10] can be effectively reduced for that when the device is turning on, the parasitic BJT turns on first, then the MOS structure turns on after the channel inversion. The voltage drop accross the p-base makes the channel potential lower than the gate potential, so the channel can be inverted.…”
Section: Device Structurementioning
confidence: 99%