Simulation and fabrication of piezoresistive membrane type MEMS strain sensors

A novel micro-gripper is designed and fabricated to manipulate the micro-sized object like a cell. In order to grip the cell, the micro-gripper should be operated in the liquid environment. Since the mechanical type micro-gripper is rarely affected by the surroundings, it is suitable to treat the cell. The other consideration for manipulating the cell is properties of the cell such as the bursting force and the maximum deformation of the cell for the applied force. Thus, the sensor system is needed to measure the force on the cell during the gripping. On this micro-gripper, a piezoresistive sensor is integrated for sensing the gripping force. Using the fabricated micro-gripper, micro-glass beads are successfully manipulated in the water. The resistance in the piezoresistor is changed by 0.06∼0.07% for each 10 µN of the applied force. Therefore, since the proposed micro-gripper satisfies the requisite conditions, it can be utilized for manipulation of the cell.

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“…Usually, the piezoresistor uses the change rate of the resistance from 0.1% to 2% [13], and it is represented as the blue domain in Fig. 2 (a).…”

Section: Finger and Fingertip Designmentioning

confidence: 99%

Design and Fabrication of the Micro-Gripper for Manipulating the Cell

Han

Lee

Moon

et al. 2007

Integrated Ferroelectrics

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“…Usually, the piezoresistor uses the change rate of the resistance from 0.10% to 2% [5]. The domain is represented as the blue domain in Fig.…”

Section: Micro-gripper Designmentioning

confidence: 99%

Fabrication of the micro-gripper with a force sensor for manipulating a cell

Han

Lee

Moon

et al. 2006

2006 SICE-ICASE International Joint Conference

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A novel micro-gripper has been designed and fabricated to manipulate the small object like a cell. In order to gripping the cell, it should be no restriction to use the micro-gripper in the water. Since the mechanical type micro-gripper is little affected by a surrounding so as to use freely in any environment, compared with other type micro-grippers, it is suitable to treat the cell. In addition, it can reduce the deformation of the cell and control the gripping force flexibly. A point to be considered to manipulate the cell is the force working on the cell and the deformation of the cell according to the applied force. On the gripper a piezo-resistive sensor is integrated for sensing the gripping force. Using the fabricated micro-gripper, micro-glass beads can be successfully manipulated in the water. The resistor of the piezoresistive sensor is successfully changed according to the force on the micro-gripper. If on-going feedback experiment in the gripper system is finished successfully, the proposed micro-gripper can be utilized for manipulating the cell.

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“…Several physical sensing principles have been explored in MEMS strain sensors, including the modulation of optical, capacitive, piezoelectric, and piezoresistive properties or frequency shift [15,16]. More particularly, piezoresistive MEMS strain sensors are favourable and attractive, due to a number of key advantages such as high sensitivity [17], low noise, better scaling characteristics, low cost and their ability to have the detection electronics circuit further away from the sensor, or on the same sensing board.…”

Section: Introductionmentioning

confidence: 99%

Mechatronic Scanning System with Integrated Micro Electro Mechanical System Position Sensors

Stavrov¹,

Chakarov²,

Shulev³

et al. 2016

Journal of Theoretical and Applied Mechanics

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Abstract. In this paper, a study of a mechatronic scanning system for application in the microbiology, microelectronics research, chemistry, etc. is presented. Integrated silicon micro electro mechanical system (MEMS) position sensor is used for monitoring the displacement of the scanning system. The utilized silicon MEMS sensors with sidewall embedded piezoresistors possess a number of key advantages such as high sensitivity, low noise and extremely low temperature dependence. Design of 2D scanning system with a travel range of 22 × 22 µm 2 has been presented in present work. This system includes a Compliant Transmission Mechanism, (CTM) designed as a complex elastic mechanism, comprising four parallelograms. Computer aided desigh (CAD) model and finite element analysis (FEA) of the Compliant Transmission Mechanism mechanisms have been carried out. A prototype of the scanning system is fabricated, based on CAD model. An experimental set-up of an optical system and a correlation technique for digital image processing have been used for testing the scanning system prototype. Results of the experimental investigations of the prototyped scanning system are also presented.

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Simulation and fabrication of piezoresistive membrane type MEMS strain sensors

Cited by 54 publications

References 11 publications

Design and Fabrication of the Micro-Gripper for Manipulating the Cell

Design and Fabrication of the Micro-Gripper for Manipulating the Cell

Fabrication of the micro-gripper with a force sensor for manipulating a cell

Mechatronic Scanning System with Integrated Micro Electro Mechanical System Position Sensors

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