Simulation and analysis of RF MEMS cantilever switch for low actuation voltage

Khan, Aamir Saud; Shanmuganantham, T.

doi:10.1109/iccs1.2017.8325999

Cited by 4 publications

(2 citation statements)

References 4 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…the system of nonlinear equation is given based on the assumption of Euler Beam equation as (7) where 'I', 'V' . 'w0','w', 'σo' represents the moment of inertia, pull-in voltage, initial gap between top and bottom electrodes, displacement of top electrode with application of voltage and residual stress, respectively.…”

Section: Mathematical Modelling Of Cantilever Beammentioning

confidence: 99%

“…The models provide a basis for understanding the electro-mechanical behavior of the cantilever beams and predicting their performance as RF switches. The simulation and analysis of a RF MEMS cantilever switch designed to operate at low actuation voltage is presented in [7]. The study of electrostatically actuated RF MEMS cantilever switch discusses how crucial it is to comprehend the actuation voltage specifications for RF MEMS switches in the context of wireless communication systems and optimization of switch design [8].…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Mathematical Modelling of Electrostatically Actuated Cantilever Beams

SRE,

P.A.

2023

Preprint

View full text Add to dashboard Cite

This study presents a mathematical model for an electrostatically actuated cantilever beam using COMSOL Multiphysics and Wolfram Mathematica. The model is used to investigate the pull-in voltage phenomenon, which refers to the voltage required to pull the beam to touch the bottom electrode. The cantilever beam is modeled as a micro-electromechanical system (MEMS) structure and is electrostatically actuated by applying a voltage between the beam and the bottom electrode. The model takes into account the electrostatic forces and the mechanical deflection of the beam. Parametric analysis is performed using COMSOL Multiphysics and then Wolfram Mathematica tool is used to validate the results obtained from the simulations. The mathematical model is developed using Galerkin's method. This study provides insights into the design and optimization of MEMS devices for various applications such as sensors and actuators.

show abstract

Section: Mathematical Modelling Of Cantilever Beammentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%