SIMS study of plumes generated from laser ablation of polymers

Li, Z.L.; Yow, S.Z.; Lui, L. W. Y.; Yakovlev, N.L.; Sun, Yunlong; Swenson, Edward J.; Moran, P.M.

doi:10.1007/s00339-002-1962-y

Cited by 7 publications

(3 citation statements)

References 13 publications

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“…Polyimide is also used for its good mechanical strength, high thermal properties, and resistance to abrasive chemicals. Most research papers have concentrated their research on the Dupont™ brand of polyimide films (Srinivasan, 1993; Luk'yanchuk et al , 1997; Ilie et al , 2005, 2007; Mullan et al , 2005, 2007; Himmelbauer et al , 1996; Küper et al , 1993; Metayer et al , 2001; Bäuerle et al , 1997; Pervolaraki et al , 2004; Li et al , 2004; Hauer et al , 2003; Shin et al , 2006). There are many suppliers of polyimide film within the FPCB industry, but there are no comparison studies indicating how the various properties of these films can be used for microvia drilling.…”

Section: Introductionmentioning

confidence: 99%

“…Excimer lasers' broad range of UV wavelengths, small features sizes, and variable pulse widths have made them useful research tools. Nd:YAG lasers at 355 nm are the second most used laser for polyimide processing (Yung et al , 2000; Ilie et al , 2005; Shin et al , 2007; Gordon et al , 2007; Li et al , 2004, 2007; Yung et al , 2001; Mullan et al , 2005); however most studies use either Coherent ® or Spectra Physics ® laser sources. These commercially available lasers use short pulse widths as stated from the manufacturer's data sheets: 12 ns at 50 kHz for the Spectra Physics™ HIPPO ® laser and 35 ns at 60 kHz for the Coherent™ AVIA 4500 ® .…”

Section: Introductionmentioning

confidence: 99%

“…The black solid particles ejected from the IR laser suggest that the particles are charred polyimide, indicating a thermal interaction. Compound analysis for plume formation at 355 nm in different environmental gases identified distinct hemispherical shapes, and blast wave analysis has shown that particles travel several 100 μ m from the microvia (Srinivasan, 1993; Li et al , 2004; Hauer et al , 2003). Plasma processing after laser microvia formation has been shown to clean debris and increase peel strength in metallization applications (Lin and Liu, 2008).…”

Section: Introductionmentioning

confidence: 99%

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Laser microvia formation in polyimide thin films for metallization applications

Roeger

2011

Circuit World

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Purpose -The purpose of this paper is to demonstrate laser microvia drilling of polyimide thin films from multiple sources before metallic sputtering. This process flow reduces Flexible Printed Circuit Board (FPCB) material, chemical and operational costs by 90 per cent in the construction of flexible circuits. Design/methodology/approach -The UV laser percussion drilling of microvias in 25 mm thick polyimide films with low coefficients of thermal expansion (CTE) and elastic modulii was investigated. Results were obtained using Scanning Electron Microscopy and Surface Profilometry. Polyimide films tested included: Duponte Kapton w EN; Kolon w GP and LV; Apical w NPI; and Taimidee TA-T. Findings -There was no direct relationship between the top and bottom diameters and ablation depth rates between the polyimide films tested using the same test conditions. There was a direct relationship with exit diameters and etch rates at different laser pulse frequency rates and fluence levels. Laser pulse rates at 30 kHz produced 20 per cent larger exit diameters than at 70 kHz, however at 70 kHz the first pulse etched 16.5 per cent more material. High fluence levels etched more material but with a lower etch efficiency rate. Other microvia quality concerns such as surface swelling, membrane residues on the bottom side and surface debris inside the microvias were observed. Nanoscale powder-like surface debris was observed on all samples in all test conditions. Originality/value -This is the first comparison of material specifications and costs for films from multiple polyimide manufactures and laser microvia drilling. The paper also is the first to demonstrate results using a JDSUe Lightwave Q302 w laser rail. The results provide the first insights into potential microvia membrane issues and debris characteristics.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Laser microvia formation in polyimide thin films for metallization applications

Roeger

2011

Circuit World

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Current literature in mass spectrometry

2005

J. Mass Spectrom.

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In order to keep subscribers up‐to‐date with the latest developments in their field, John Wiley & Sons are providing a current awareness service in each issue of the journal. The bibliography contains newly published material in the field of mass spectrometry. Each bibliography is divided into 11 sections: 1 Books, Reviews & Symposia; 2 Instrumental Techniques & Methods; 3 Gas Phase Ion Chemistry; 4 Biology/Biochemistry: Amino Acids, Peptides & Proteins; Carbohydrates; Lipids; Nucleic Acids; 5 Pharmacology/Toxicology; 6 Natural Products; 7 Analysis of Organic Compounds; 8 Analysis of Inorganics/Organometallics; 9 Surface Analysis; 10 Environmental Analysis; 11 Elemental Analysis. Within each section, articles are listed in alphabetical order with respect to author (4 Weeks journals ‐ Search completed at 3rd. Nov. 2004)

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