The
surface relief structure of polymer films over large areas
can be controlled by combining nanoscale imprinting and microscale
ultraviolet–ozone (UVO) radiation, resulting in hierarchical
structured surfaces. First, nanoscale patterns were formed by nanoimprinting
elastomer [poly(dimethylsiloxane) (PDMS)] films with a pattern on
a digital video disk. Micron-scale patterns were then superimposed
on the nanoimprinted PDMS films by exposing them to ultraviolet radiation
in oxygen (UVO) through a transmission electron microscopy grid mask
having variable microscale patterning. UVO exposure leads to conversion
and densification of PDMS to SiO
x
, leading
to micron height relief features that follow a linear scaling relation
with pattern dimension. Further, the pattern scopes are shown to collapse
into a master curve by normalized feature values. Interestingly, these
relief structures preserve the nanoscale features. In this paper,
the influence of the self-limiting PDMS densification, wall stress
at the boundary of micro-depression, and UVO exposure energy is studied
in control of the micro-depression scale. This simple two-step imprinting
process involving both nanoimprinting and UV radiation allows for
facile fabrication of the dimension adjustable micro–nano hierarchically
structures not only on elastomer films but also on thermoplastic polymer
films. Coarse-grained molecular dynamics simulations were performed
to correlate the surface tension and elastic properties of polymeric
materials to the deformation of the pattern structure.