2011
DOI: 10.1021/la2029824
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Simplest Method for Creating Micropatterned Nanostructures on PDMS with UV Light

Abstract: The fabrication of micropatterned structures on PDMS is a critical step in soft lithography, microfluidics, and many other PDMS-based applications. To substitute traditional mold-casting methods, we develop a simple method to create micropatterned nanostructures on PDMS in one step. After exposing a flat PDMS surface to a UV pen lamp through a photomask (such as a TEM grid), micropatterned nanostructures can be formed readily on the PDMS surface. We also demonstrate that fabricated PDMS can be used for the mic… Show more

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Cited by 17 publications
(15 citation statements)
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“…In our approach to the fabrication of hierarchical film patterns with a large depth relief over large areas, we have combined soft imprint lithography 12 with an ultraviolet–ozone (UVO) exposure step. 13 In this method, nanoscale digital video disk (DVD) patterns are initially transferred onto an elastomeric substrate [poly(dimethylsiloxane) (PDMS)] through direct nanoimprinting, whereas in-plane and out-of-plane microscale structuring of the films were created by simply UVO irradiating the film through transmission electron microscopy (TEM) grids with different hole configurations. The mechanism of how the wall stress built up at the boundary region of micro-recession is systematically studied.…”
Section: Introductionmentioning
confidence: 99%
“…In our approach to the fabrication of hierarchical film patterns with a large depth relief over large areas, we have combined soft imprint lithography 12 with an ultraviolet–ozone (UVO) exposure step. 13 In this method, nanoscale digital video disk (DVD) patterns are initially transferred onto an elastomeric substrate [poly(dimethylsiloxane) (PDMS)] through direct nanoimprinting, whereas in-plane and out-of-plane microscale structuring of the films were created by simply UVO irradiating the film through transmission electron microscopy (TEM) grids with different hole configurations. The mechanism of how the wall stress built up at the boundary region of micro-recession is systematically studied.…”
Section: Introductionmentioning
confidence: 99%
“…Thus, a second material different to the substrate can be selectively deposited over well‐defined regions. The method involves typical steps of different mask‐assisted and e‐beam lithographic techniques reported in the literature,, as it is schematized in Figure . Precursor solutions of PMMA were prepared by dissolving 0.05 g of PMMA monomer in 1.5 mL of the polymerizer under continuous stirring until complete homogenization (typically 3 h).…”
Section: Resultsmentioning
confidence: 99%
“…For example, patterning of films that are sensitive to an e‐beam (such as PMMA) could be possible using a basic SEM instrument and proper masks. On that sense, techniques that rely on the use of masks for replicating a pattern are based on the modification of sensitive films by a physical or chemical process (e.g., etching,, deposition, chemical transformation by radiation) only on regions that are not covered by a laying mask, which may be followed by a further revealing process. A wide variety of ordered grids and porous membranes machined with micrometric and nanometric precisions can function as masks.…”
Section: Introductionmentioning
confidence: 99%
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“…According to literature reports34353637, UV-irradiation will induce PDMS chain scissions, involving both the main chain and the side groups, ultimately leading to the formation of new Si-O-Si bonds. This silica-like structure is denser and more compact, resulting in the rupture of PDMS networks on the surface region.…”
Section: Resultsmentioning
confidence: 99%