Simple versatile method for fabricating guided-wave gratings

Xu, M.; Moshrefzadeh, Robert S.; Gibson, Ursula J.; Stegeman, George I.; Seaton, C. T.

doi:10.1364/ao.24.003155

Cited by 108 publications

(44 citation statements)

References 8 publications

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“…We employed single-beam holographic lithography 21 to fabricate the slanted sinusoidal grating. First, a 450-nm-thick layer of Shipley 9912 antireflection positive photoresist was spin coated on a thick glass substrate.…”

Section: A Sample Design and Fabricationmentioning

confidence: 99%

Asymmetrical excitation of surface plasmon polaritons on blazed gratings at normal incidence

et al. 2009

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We present results of numerical simulations and preliminary experiments to investigate and characterize the effect of asymmetrical coupling of normally incident light to surface plasmon polaritons ͑SPPs͒ on metallic blazed gratings. Two types of blazed gratings are investigated, a two-dimensional ͑2D͒ area-coded binary grating and a one-dimensional ͑1D͒ slanted sinusoidal grating. The 2D blazed grating, which can be fabricated with standard e-beam lithography, is shown to have the same ability as the classical 1D blazed grating to enhance the strength of the −1st͑+1st͒ evanescent order over the +1st͑−1st͒ counterpart, which leads to the asymmetrical excitation of two counterpropagating SPP modes on the grating surface. The 1D blazed grating, as a reference, is also studied experimentally to verify the previous theoretical predictions. In our first experiments, the observed asymmetrical coupling effect is relatively weak compared with the optimal designs due to many practical limitations. However, good agreement between theory and experiment has been obtained, and physical insight concerning the observed SPP coupling phenomena has been gained. Further measures to realize stronger asymmetrical excitation of SPPs on blazed gratings at normal incidence are discussed.

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Section: A Sample Design and Fabricationmentioning

confidence: 99%

Asymmetrical excitation of surface plasmon polaritons on blazed gratings at normal incidence

et al. 2009

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“…First, a grating profile was fabricated by combining a holographic method for the grating structure 29 and photolithography for the channel patterning. Briefly, a HeCd laser beam with a wavelength of k ¼ 325 nm passes through a spatial filter to form an expanded collimated beam.…”

Section: Integration Of Grating-coupled Surface Plasmon Resonancmentioning

confidence: 99%

Integrating plasmonic diagnostics and microfluidics

et al. 2015

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Plasmonics is generally divided into two categories: surface plasmon resonance (SPR) of electromagnetic modes propagating along a (noble) metal/dielectric interface and localized SPRs (LSPRs) on nanoscopic metallic structures (particles, rods, shells, holes, etc.). Both optical transducer concepts can be combined with and integrated in microfluidic devices for biomolecular analyte detections, with the benefits of small foot-print for point-of-care detection, lowcost for one-time disposal, and ease of being integrated into an array format. The key technologies in such integration include the plasmonic chip, microfluidic channel fabrication, surface bio-functionalization, and selection of the detection scheme, which are selected according to the specifics of the targeting analytes. This paper demonstrates a few examples of the many versions of how to combine plasmonics and integrated microfluidics, using different plasmonic generation mechanisms for different analyte detections. One example is a DNA sensor array using a gold film as substrate and surface plasmon fluorescence spectroscopy and microscopy as the transduction method. This is then compared to gratingcoupled SPR for poly(ethylene glycol) thiol interaction detected by angle interrogation, gold nanohole based LSPR chip for biotin-strepavidin detection by wavelength shift, and gold nanoholes/nanopillars for the detection of prostate specific antigen by quantum dot labels excited by the LSPR. Our experimental results exemplified that the plasmonic integrated microfluidics is a promising tool for understanding the biomolecular interactions and molecular recognition process as well as biosensing, especially for on-site or point-of-care diagnostics. V C 2015 AIP Publishing LLC. [http://dx

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“…The most common and widely used wavefront-splitting configuration incorporates a Lloyd's mirror to reflect a portion of an expanded source beam to intersect with the transmitted portion as depicted in Figure 5(a). As early as 1985, a Lloyd's mirror configuration was used as a simple way to fabricate linear grating couplers [100]. Again, multiple exposures are required with this configuration to produce 2D and 3D patterns [101], with one recent report of a Lloyd's mirror capable of producing three beams with 120 degree symmetry [102].…”

Section: (A) (C) (B) (D)mentioning

confidence: 99%

Multi-Beam Interference Advances and Applications: Nano-Electronics, Photonic Crystals, Metamaterials, Subwavelength Structures, Optical Trapping, and Biomedical Structures

Burrow

Gaylord

2011

Micromachines

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Abstract:Research in recent years has greatly advanced the understanding and capabilities of multi-beam interference (MBI). With this technology it is now possible to generate a wide range of one-, two-, and three-dimensional periodic optical-intensity distributions at the micro-and nano-scale over a large length/area/volume. These patterns may be used directly or recorded in photo-sensitive materials using multi-beam interference lithography (MBIL) to accomplish subwavelength patterning. Advances in MBI and MBIL and a very wide range of applications areas including nano-electronics, photonic crystals, metamaterials, subwavelength structures, optical trapping, and biomedical structures are reviewed and put into a unified perspective.

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Simple versatile method for fabricating guided-wave gratings

Cited by 108 publications

References 8 publications

Asymmetrical excitation of surface plasmon polaritons on blazed gratings at normal incidence

Asymmetrical excitation of surface plasmon polaritons on blazed gratings at normal incidence

Integrating plasmonic diagnostics and microfluidics

Multi-Beam Interference Advances and Applications: Nano-Electronics, Photonic Crystals, Metamaterials, Subwavelength Structures, Optical Trapping, and Biomedical Structures

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