Simple performance models for integrated processing tools

Wood, S.C.

doi:10.1109/66.536105

Cited by 66 publications

(27 citation statements)

References 8 publications

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“…Thus, the effect of changing one activity is a nondecreasing piecewise linear function. Wood (1996) calculates a semiconductor lot's total processing time by using two parameters. The first is the incremental lot cycle time (t), which is defined as the average increase in the lot cycle time that results from a lot size increase of one wafer.…”

Section: Graphical Approachmentioning

confidence: 99%

“…Many diverse industries use robotic cells (see Section 11). A large number of studies address the semiconductor manufacturing industry: Akçali, Nemoto, and Uzsoy (2001), Kumar, Ramanan, and Sriskandarajah (2005), Perkinson et al (1994), Perkinson, Gyurcsik, and McLarty (1996), Venkatesh et al (1997), and Wood (1996). Other implementations for which studies have been published include machining of castings for truck differential assemblies (Asfahl, 1985), a single hoist electroplating line for printed circuit boards (Lei and Wang, 1994), testing and inspecting boards used in mainframe computers (Miller, 1984), crane scheduling for computer integrated manufacturing, textile mills, and engine block manufacturing (Su and Chen, 1996).…”

Section: Introductionmentioning

confidence: 99%

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Sequencing and Scheduling in Robotic Cells: Recent Developments

Dawande

Geismar

Sethi

et al. 2005

J Sched

190

116

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A great deal of work has been done to analyze the problem of robot move sequencing and part scheduling in robotic flowshop cells. We examine the recent developments in this literature. A robotic flowshop cell consists of a number of processing stages served by one or more robots. Each stage has one or more machines that perform that stage's processing. Types of robotic cells are differentiated from one another by certain characteristics, including robot type, robot travel-time, number of robots, types of parts processed, and use of parallel machines within stages. We focus on cyclic production of parts. A cycle is specified by a repeatable sequence of robot moves designed to transfer a set of parts between the machines for their processing.We start by providing a classification scheme for robotic cell scheduling problems that is based on three characteristics: machine environment, processing restrictions, and objective function, and discuss the influence of these characteristics on the methods of analysis employed. In addition to reporting recent results on classical robotic cell scheduling problems, we include results on robotic cells with advanced features such as dual gripper robots, parallel machines, and multiple robots. Next, we examine implementation issues that have been addressed in the practice-oriented literature and detail the optimal policies to use under various combinations of conditions. We conclude by describing some important open problems in the field.

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Section: Graphical Approachmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Sequencing and Scheduling in Robotic Cells: Recent Developments

Dawande

Geismar

Sethi

et al. 2005

J Sched

190

116

View full text Add to dashboard Cite

show abstract

“…Logically, many IPT equipment units can be seen as a job-shop production line or even a small factory. Therefore, modeling and performance analysis for IPT has never been easy and is always a research focus in semiconductor manufacturing, for example [7][8][9][10][11].…”

Section: Introductionmentioning

confidence: 99%

A Throughput Management System for Semiconductor Wafer Fabrication Facilities: Design, Systems and Implementation

Hsieh

Hsieh²

2018

Processes

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Equipment throughput is one of the most critical parameters for production planning and scheduling, which is often derived by optimization techniques to achieve business goals. However, in semiconductor manufacturing, up-to-date and reliable equipment throughput is not easy to estimate and maintain because of the high complexity and extreme amount of data in the production systems. This article concerns the development and implementation of a throughput management system tailored for a semiconductor wafer fabrication plant (Fab). A brief overview of the semiconductor manufacturing and an introduction of the case Fab are presented first. Then, we focus on the system architecture and some concepts of crucial modules. This study also describes the project timescales and difficulties and discusses both tangible and intangible benefits from this project.

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“…Simple, intuitive models of the cycle time, throughput, and wafer cost of integrated single-wafer tools have been proposed in [41]. The models use two measurable parameters that aggregate tool operations: the incremental cycle time, which is the average increase in cycle time resulting from a lot size increment of one wafer, and the fixed cycle time, which is the portion of the cycle time that is independent of lot size.…”

Section: Introductionmentioning

confidence: 99%

“…The models use two measurable parameters that aggregate tool operations: the incremental cycle time, which is the average increase in cycle time resulting from a lot size increment of one wafer, and the fixed cycle time, which is the portion of the cycle time that is independent of lot size. Analytical models of the incremental and fixed cycle times are used in [41] to study the effects of tool configuration on its performance.…”

Section: Introductionmentioning

confidence: 99%

Cluster Tools With Chamber Revisiting—Modeling and Analysis Using Timed Petri Nets

Zuberek

2004

IEEE Trans. Semicond. Manufact.

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Abstract-Timed Petri nets are formal models of discrete concurrent systems. Since the durations of all activities are included in the model descriptions, many performance characteristics can be derived from such models. In the case of cluster tools, net models represent the flow of wafers through the chambers of the tool as well as consecutive actions performed by the robotic transporter. Steady-state performance of cluster tools with chamber revisiting is investigated in this paper. A systematic development of detailed tool schedules, based on a general behavioral description of the tool, is proposed and is used to derive the corresponding Petri net models. Symbolic performance characteristics of the modeled tools are obtained by using place invariants, without exhaustive reachability analysis. Simple examples presented in the paper can be easily extended in many ways.

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Simple performance models for integrated processing tools

Cited by 66 publications

References 8 publications

Sequencing and Scheduling in Robotic Cells: Recent Developments

Sequencing and Scheduling in Robotic Cells: Recent Developments

A Throughput Management System for Semiconductor Wafer Fabrication Facilities: Design, Systems and Implementation

Cluster Tools With Chamber Revisiting—Modeling and Analysis Using Timed Petri Nets

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