Silver(I) aryloxide–triphenylphosphine complexes. An assessment of their potential as CVD precursors and the structure of [Ag(OC6H4Me-2)(PPh3)3]·2-MeC6H4OH·C6H5Me

Edwards, D. A.; Mahon, Mary F.; Molloy, Kieran C.; Ogrodnik, Virginie

doi:10.1016/s0020-1693(03)00077-x

Cited by 16 publications

(4 citation statements)

References 27 publications

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“…Deposition 2006, 12, 583-596 carboxylates, and their phosfine adducts. [113] Silver aryloxide-triphenylphosphine complexes [Ag(OR)(PPh 3 ) 2 ] (R=C 6 H 2 Cl 3 -2,4,6, C 6 H 4 Me-2, or C 6 H 2 (CH 2 NMe 2 ) 3 -2,4,6) and [Ag(OR)(PPh 3 ) 3 ]ÁROH (R=Ph or C 6 H 4 Me-2) were tested as silver precursors, [114] but the deposited films had poor quality in terms of appearance, thickness, and adhesion, and were inferior to those grown from silver carboxylates, fluorocarboxylates, b-ketoenolates, and b-ketoiminates. [110] Triphenylphosphine adducts of silver b-diketonates and b-ketoiminates were used at 310°C in nitrogen.…”

Section: Metallic Filmsmentioning

confidence: 99%

Processing and Applications of Aerosol‐Assisted Chemical Vapor Deposition

Hou

Choy

2006

Chemical Vapor Deposition

224

173

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The aerosol‐assisted (AA) CVD method involves the atomization of a precursor solution into fine, sub‐micrometer‐sized aerosol droplets which are delivered to a heated reaction zone and undergo evaporation, decomposition, and homogeneous and/or heterogeneous chemical reactions to form the desired products. As a variant of conventional CVD processes, AACVD addresses the availability and delivery problems of the chemical precursors. A wide range of precursors can be used since volatility is no longer crucial, offering more possibilities to produce high‐quality CVD products at low cost. Some variants of AACVD have also been developed, such as AA combustion (C) CVD, electrostatic spray‐assisted vapor deposition (ESAVD), and electrostatic‐assisted aerosol jet deposition (EAAJD). These variants provide additional flexibility and capability to the AACVD‐based processes. AACVD‐based processes have attracted increasing interest in most of the CVD‐related areas, and have been widely used to synthesize various films, coatings, powders, composites, nanotubes and nanowires, etc. This review highlights the principles, applications, and recent progress of AACVD‐based processes.

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Section: Metallic Filmsmentioning

confidence: 99%

Processing and Applications of Aerosol‐Assisted Chemical Vapor Deposition

Hou

Choy

2006

Chemical Vapor Deposition

224

173

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“…[10,11] However, these complexes have such low volatilities that the conventional evaporation process is useless. Special low-pressure deposition techniques, [12] or special precursor evaporation methods, such as powder flash evaporation, [13] powder feed methods, [14] or aerosol-assisted CVD, [15,16] have been developed. Direct liquid injection is the process of choice to minimize the thermal degradation of the respective precursors.…”

Section: Introductionmentioning

confidence: 99%

“…[18,19] Triphenylphosphine silver aryloxide complexes have also been studied as potential CVD precursors, but the results were disappointing. [16] Deposition experiments are typically used as a screening method for newly synthesized precursor substances, but this is often time-consuming and requires the definition of the evaporation conditions. A second discouraging factor is the substantial amount of the precursor required to accomplish such systematic screening.…”

Section: Introductionmentioning

confidence: 99%

CVD with Tri‐ⁿbutylphosphine Silver(I) Complexes: Mass Spectrometric Investigations and Depositions

Haase¹,

Kohse‐Höinghaus²,

Bahlawane³

et al. 2005

Chemical Vapor Deposition

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Tri-n butylphosphine silver(I) complexes were synthesized and characterized with respect to their suitability for the CVD of silver thin films. The volatility and thermal stability of these complexes were investigated using temperature-programmed and in-situ mass spectrometry (MS). Complexes with smaller carboxylate ligands showed superior long-term stability and had the advantage of evaporation without decomposition. Careful examination of the fragments detected during evaporation and in a CVD reactor allowed us to propose the gas-phase decomposition mechanisms of some potentially suitable silver precursors. Deposition experiments in a cold-wall CVD reactor using selected precursors resulted in smooth and conductive silver coatings.

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“…The deposition temperature determined whether a mixture of silver sulfide and silver or silver only films were obtained. Molloy and co-workers have reported silver films by AACVD using silver carboxylates, fluorocarboxylates, β-diketonates, β-diketoiminates, and aryl oxides as phosphine adducts to give useful precursors which were, however, considered unsuitable for conventional CVD …”

Section: Introductionmentioning

confidence: 99%

Nanoparticles and Thin Films of Silver from Complexes of Derivatives of N-(Diisopropylthiophosphoryl)thioureas

et al. 2009

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The derivatives of N-(diisopropylthiophosphoryl)thiourea RC(S)NHP(S)(O i Pr) 2 (R = C 5 H 11 N, C 5 H 6 N 2 or C 10 H 7 NH 2 ) followed by their complexation with silver are reported. All complexes are decomposed in hot hexadecylamine (HDA) to give HDA-capped silver nanoparticles. The absorption spectra of the HDA-capped silver nanoparticles exhibit surface plasmon resonance (SPR) absorption in the 400-420 nm region. Transmission electron microscopy (TEM) images of all particles are close to spherical in shape; with sizes ranging from 17 to 20 nm. The X-ray diffraction (XRD) patterns of the silver nanoparticles obtained from all three complexes could be indexed to face centered cubic silver. Scanning electron microscopy (SEM) image confirmed the spherical shape of the particles. The silver complex of 1-naphthylamine was also used to deposit thin films of silver by the aerosol-assisted chemical vapor deposition (AACVD).

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Silver(I) aryloxide–triphenylphosphine complexes. An assessment of their potential as CVD precursors and the structure of [Ag(OC6H4Me-2)(PPh3)3]·2-MeC6H4OH·C6H5Me

Cited by 16 publications

References 27 publications

Processing and Applications of Aerosol‐Assisted Chemical Vapor Deposition

Processing and Applications of Aerosol‐Assisted Chemical Vapor Deposition

CVD with Tri‐ⁿbutylphosphine Silver(I) Complexes: Mass Spectrometric Investigations and Depositions

Nanoparticles and Thin Films of Silver from Complexes of Derivatives of N-(Diisopropylthiophosphoryl)thioureas

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Silver(I) aryloxide–triphenylphosphine complexes. An assessment of their potential as CVD precursors and the structure of [Ag(OC6H4Me-2)(PPh3)3]·2-MeC6H4OH·C6H5Me

Cited by 16 publications

References 27 publications

Processing and Applications of Aerosol‐Assisted Chemical Vapor Deposition

Processing and Applications of Aerosol‐Assisted Chemical Vapor Deposition

CVD with Tri‐nbutylphosphine Silver(I) Complexes: Mass Spectrometric Investigations and Depositions

Nanoparticles and Thin Films of Silver from Complexes of Derivatives of N-(Diisopropylthiophosphoryl)thioureas

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CVD with Tri‐ⁿbutylphosphine Silver(I) Complexes: Mass Spectrometric Investigations and Depositions