Silicon wafer crack detection using nonlinear ultrasonic modulation induced by high repetition rate pulse laser

Jang, Jinho; Li, Peipei; Kim, Byunggi; Kim, Seungwoo; Sohn, Hoon

doi:10.1016/j.optlaseng.2020.106074

Cited by 25 publications

(8 citation statements)

References 19 publications

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“…8: The experimental setup of cantilever aluminum beam with loosening of the boundary condition as defect an inductor, the results are first measured for the state with a tight boundary (healthy state), and then the results are obtained for the state with a loose boundary (defected state). Figure (9) illustrates the healthy and defected state results for the NWM with and without the inductor for the 61 kHz pump frequency and the 250 kHz carrier. In this case, the pump inductor (L1) and the carrier inductor (L4) are chosen according to Figure (5) and Table (4).…”

Section: Aluminum Beammentioning

confidence: 99%

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A novel method for improving damage detectability in nonlinear wave modulation: Modeling and design of a driving system

Sepehry

Asadi

Ehsani

et al. 2022

Preprint

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Nonlinear wave modulation (NWM) is a nonlinear health monitoring technique that allows for the early detection of minor faults and damages. The purpose of this study is to develop a novel, low-cost and portable device to improve the damage index (DI) in the NWM. 2D spectral ﬁnite element method is used to model the electromechanical coupling between piezoelectric patches, an inductor and a structure in a feasibility study. In the simulation, an inductor is attached to each actuator to compare the results with those without an inductor. A speciﬁc inductance value is selected for the piezoelectric transducer to achieve resonance, which results in an increased voltage amplitude. A circuit that is inexpensive and portable has been designed and implemented. The results of two experimental setups, an aluminum beam with boundary loosening and a sandwich panel with bolt loosening as damage, are compared with those of the NWM without an inductor. The average of sidebands as a DI is then compared for various frequency combinations using the two NWM techniques i.e. with and without an inductor.

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Section: Aluminum Beammentioning

confidence: 99%

“…Some previous studies have used linear methods in SHM [6][7][8]. The piezoelectric patches can be used for online monitoring of structures [6,[9][10][11][12]. As opposed to linear damage detection methods, nonlinear methods detect damage at an earlier stage [13].…”

Section: Introductionmentioning

confidence: 99%

A novel method for improving damage detectability in nonlinear wave modulation: Modeling and design of a driving system

Sepehry

Asadi

Ehsani

et al. 2022

Preprint

View full text Add to dashboard Cite

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“…In order to better understand the basic principle of nonlinear ultrasonic testing technology, the research status and progress of this technology in the field of early damage detection of metal materials are introduced. The ultrasonic nonlinear technology is summarized from the aspects of higher harmonic [ 17 , 18 , 19 ] beam mixing and modulation [ 20 , 21 , 22 ], sub-harmonic [ 23 ], resonance frequency spectrum analysis [ 24 ], ultrasonic phased array nonlinear imaging [ 25 ] in this paper. The key technologies and problems are summarized.…”

Section: Introductionmentioning

confidence: 99%

Research Progress in Nonlinear Ultrasonic Testing for Early Damage in Metal Materials

2023

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There are some limitations when conventional ultrasonic testing methods are used for testing early damage in metal parts. With the continuous development of acoustics and materials science, nonlinear ultrasonic nondestructive testing technology has been used for testing of early damage in metal materials. In order to better understand the basic theory and research progress of the nonlinear ultrasonic testing technology, the classical nonlinear ultrasonic theoretical models, including the dislocation monopole model, dislocation dipole model, precipitate-dislocation pinning model, and contact nonlinear ultrasonic theory-microcrack model, are analyzed in depth. This paper introduces the application and research progress of nonlinear ultrasonic detection technology, which is derived from different acoustic nonlinear effects, such as higher harmonic, wave mixing and modulation, sub-harmonic, resonance frequency spectrum analysis, and non-linear ultrasonic phased array imaging. The key technologies and problems are summarized to provide a reference for the further development and promotion of nonlinear ultrasonic non-destructive testing technology.

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“…The nonlinear ultrasonic testing methods used in practice mainly include higher harmonic [16,17], beam mixing and modulation [18][19][20], resonant frequency spectrum analysis, and nonlinear ultrasonic phased array imaging methods [21]. The higher harmonic detection method is more widely used because of its simple and convenient technology.…”

Section: Introductionmentioning

confidence: 99%

A Novel Method for Early Fatigue Damage Diagnosis in 316L Stainless Steel Formed by Selective Laser Melting Technology

Yan

Tang

2023

Materials

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Early fatigue damage is an important factor affecting the service safety of 316L stainless steel parts formed by selective laser melting (SLM) technology. Nonlinear ultrasonic testing for early fatigue damage in SLM 316L stainless steel specimens was carried out. A new method for evaluation of early fatigue damage based on nonlinear ultrasonic testing was proposed. Empirical mode decomposition (EMD) was applied to the unsteady ultrasonic testing signal, and the signal was decomposed into multiple intrinsic mode functions (IMFs) that meet certain conditions; then, the specific IMF (ESI) containing the effective fatigue damage information was extracted. Lastly, fast Fourier transform (FFT) was applied to the specific IMF signal to obtain the required information to evaluate the damage in the measured part caused by fatigue. The results of nonlinear ultrasonic testing agreed well with transmission electron microscope experimental analysis and theoretical model of acoustic nonlinearity caused by dislocations. The change in nonlinear ultrasonic testing results reflected the generation and evolution of dislocation structure during the low-cycle fatigue regime of the SLM 316L stainless steel specimen and revealed the early fatigue damage mechanism of this metal part. Compared with the classical FFT method, the EMD-ESI-FFT method is more sensitive in identifying the early damage in SLM 316L stainless parts induced by fatigue loading, which is equivalent to improving the early fatigue damage identification and diagnosis ability and can better ensure the service safety of important metal parts.

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Silicon wafer crack detection using nonlinear ultrasonic modulation induced by high repetition rate pulse laser

Cited by 25 publications

References 19 publications

A novel method for improving damage detectability in nonlinear wave modulation: Modeling and design of a driving system

A novel method for improving damage detectability in nonlinear wave modulation: Modeling and design of a driving system

Research Progress in Nonlinear Ultrasonic Testing for Early Damage in Metal Materials

A Novel Method for Early Fatigue Damage Diagnosis in 316L Stainless Steel Formed by Selective Laser Melting Technology

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