2020
DOI: 10.1002/admt.201901153
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Silicon Photonic Platform for Passive Waveguide Devices: Materials, Fabrication, and Applications

Abstract: Silicon photonics has attracted tremendous interest from academia and industry, as the fabrication of the silicon family of photonic devices is mostly compatible with the microelectronics process using complementary metal‐oxide semiconductors (CMOS). Herein, three silicon‐family materials are discussed: silicon, silicon nitride, and silica. In addition, hybrid integration with a 2D material, graphene, is examined. First, the material and waveguide properties are reviewed. Second, typical fabrication processes … Show more

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Cited by 118 publications
(58 citation statements)
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“…Silicon photonics is emerging as an ideal platform for integrating these components, while offering a combination of foundry compatibility and device compactness with low costs, thus allowing for the realization of on‐chip scalable neuromorphic photonic systems. The prevailing silicon photonics device development [ 56 ] makes it possible for the construction of high‐performance integrated silicon PNNs with aforementioned highly functional optical components. A growing number of commercial electronics foundries (Global Foundries, TSMC, etc.)…”
Section: Discussion and Challengesmentioning
confidence: 99%
See 1 more Smart Citation
“…Silicon photonics is emerging as an ideal platform for integrating these components, while offering a combination of foundry compatibility and device compactness with low costs, thus allowing for the realization of on‐chip scalable neuromorphic photonic systems. The prevailing silicon photonics device development [ 56 ] makes it possible for the construction of high‐performance integrated silicon PNNs with aforementioned highly functional optical components. A growing number of commercial electronics foundries (Global Foundries, TSMC, etc.)…”
Section: Discussion and Challengesmentioning
confidence: 99%
“…Silicon photonics naturally takes advantages of both electronics and photonics, enabling the same‐scale photonic integration density as microelectronics. Besides the merits mentioned earlier, the fabrication of silicon photonic devices is largely compatible with the microelectronics process using CMOS, [ 56 ] facilitating large‐scale, low‐cost reproduction of photonic chips. Light sources are also indispensable in PNNs.…”
Section: Introductionmentioning
confidence: 99%
“…Silicon photonics is a convergence platform of photonics and microelectronics, which can enable complex optical functionalities on a compact chip by using commercial CMOS chip fabrication facilities [153][154][155][156]. The silicon integrated optical chips that can generate, modulate, process and detect light signals have been recognized as a promising solution of cost-effectively meeting the ever-increasing demands on data speed and bandwidth.…”
Section: Silicon Photonics/optoelectronicsmentioning
confidence: 99%
“…1(b) shows a schematic of an SOI nanowire waveguide integrated with a GO film. The fabrication of the SOI nanowire can be achieved via either deep ultraviolet photolithography or e-beam lithography followed by inductively coupled plasma etching, all of which are mature silicon device fabrication technologies [20,104]. The GO film coating, with a thickness of ~2 nm per layer [82], can be a For simplification, the material and waveguide parameters in relevant equations are shown without the variables in the brackets.…”
Section: D Go Films and Device Structurementioning
confidence: 99%