1987
DOI: 10.1117/12.937191
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Silicon-On-Sapphire Waveguides

Abstract: The first silicon -on-sapphire optical waveguides have been demonstrated. Waveguiding at k=1.3 microns has been observed in silicon films 0.95 and 1.5 microns thick and in raised strip structures 1.5 microns thick.Previously, an epitaxial silicon -on-silicon technique was used to construct silicon waveguides for X= 1.3 or 1.55 micronsl, but the Si -on -Si technique allows guided light to spread evanescentlyinto the lossy substrate because the refractive index step between substrate and guiding layer is approxi… Show more

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Cited by 11 publications
(9 citation statements)
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“…Subsequently, single-crystal silicon waveguides [25], [26] were soon demonstrated, initially fabricated using highly doped silicon substrates. Various substrate configurations, such as silicon-on-sapphire (SOS) [29], silicon germanium [30], and SOI [9], [31], [32] were also studied. The SOI platform among them, first reported for optical applications in 1988 [31], has by far, become the most popular among the silicon-based waveguide systems.…”
Section: W a V E G U I D E A N D Pa S S I V E C O M P O N E N T Smentioning
confidence: 99%
“…Subsequently, single-crystal silicon waveguides [25], [26] were soon demonstrated, initially fabricated using highly doped silicon substrates. Various substrate configurations, such as silicon-on-sapphire (SOS) [29], silicon germanium [30], and SOI [9], [31], [32] were also studied. The SOI platform among them, first reported for optical applications in 1988 [31], has by far, become the most popular among the silicon-based waveguide systems.…”
Section: W a V E G U I D E A N D Pa S S I V E C O M P O N E N T Smentioning
confidence: 99%
“…In other ways, it is in its infancy, with some major advances being reported only very recently. The first waveguides were reported in the mid 1980s, in silicon on doped silicon [1], silicon on sapphire [2], silicon germanium [3], and Silicon on Insulator (SOI) [4,5]. The silicon on insulator platform, first reported in 1989, has by far, become the most popular of the four waveguide systems, and it is this platform that has formed the core of the work carried out by the Silicon Photonics Group at the University of Surrey, which was also established in 1989.…”
Section: Introductionmentioning
confidence: 99%
“…The first silicon waveguides were reported in the 1980s, in silicon on doped silicon [1,2], silicon on sapphire [3], silicon germanium [4], and Silicon on Insulator (SOI) [5,6]. The SOI platform, first reported in 1989, has by far, become the most popular of the four waveguide systems.…”
Section: Introductionmentioning
confidence: 99%