Wiley Encyclopedia of Electrical and Electronics Engineering 2014
DOI: 10.1002/047134608x.w3168.pub2
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Silicon‐On‐Insulator Devices

F. Balestra

Abstract: Silicon On Insulator‐based devices seem to be the best candidates for the ultimate integration of Integrated Circuits on silicon. An overview of the main SOI materials and advantages of SOI for the Nanoelectronics of the next decades is presented. Nanoscale CMOS , emerging and beyond‐ CMOS nanodevices, based on innovative concepts, technologies and device architectures, are addressed. The flexibility of the … Show more

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Cited by 12 publications
(4 citation statements)
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“…1 To resolve such problems, various contemporary MOS structures such as silicon-on-insulator (SOI) field effect transistors (FETs), multigate FETs (MuGFETs), FinFETs were invented. [2][3][4][5][6][7][8][9][10] These novel devices have mitigated SCEs to a significant extent. However, the repetitive downscaling performed on such MOS structures raises new challenges limiting further shrinkage of device size.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…1 To resolve such problems, various contemporary MOS structures such as silicon-on-insulator (SOI) field effect transistors (FETs), multigate FETs (MuGFETs), FinFETs were invented. [2][3][4][5][6][7][8][9][10] These novel devices have mitigated SCEs to a significant extent. However, the repetitive downscaling performed on such MOS structures raises new challenges limiting further shrinkage of device size.…”
Section: Introductionmentioning
confidence: 99%
“…Despite large improvements in speed and power consumption, SOI FETs are constrained by the high-cost need for wafer development. [2][3][4][5] MuGFET is well known for its enhanced gate controllability on device electrostatics. However, it encounters severe deterioration in carrier mobility at lower body thickness owing to increased carrier-carrier scattering by strong multidirectional electric fields originated from different gates.…”
Section: Introductionmentioning
confidence: 99%
“…1 To address such issue, researchers suggested various non-classical FET structures such as silicon-on-insulator (SOI) FET, FinFET etc. [2][3][4][5][6][7][8][9][10][11][12][13][14][15] Moreover, multi-gate (double-gate/tri-gate) covering to channel is a widely used technique to enhance the gate controllability in many devices (planer FET/FinFET). 8,9,12 Although, these inventions have sufficiently suppressed SCEs in sub-micron devices, each of these structures has its own constraint.…”
mentioning
confidence: 99%
“…Despite an SOI FET provides high speed, and low power consumption, the high-cost manufacturing process of this novel device restricts its mass production. [2][3][4][5][6][7] The increased gate control in a multi-gate device offers great robustness to the SCEs; however, the use of more than one gate has a detrimental impact on the carrier mobility at thin-channel devices. If multiple gates cover a thin channel (in a 2D/3D device), then in on-state the carriers flowing through it feel strong multi-directional electric fields emanating from different gates; which results in increased carrier-carrier scattering and deteriorates drain current.…”
mentioning
confidence: 99%