2019
DOI: 10.1109/lpt.2019.2915262
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Silicon Nitride Bragg Grating With Joule Thermal Tuning for External Cavity Lasers

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Cited by 5 publications
(2 citation statements)
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“…The waveguides have a width of 2.9µm in order to get single mode operation. Bragg gratings are obtained by a sidewall corrugation of the waveguide with a periodic pattern as already published by other teams [1]. Reactive Ion Etching (RIE) is used to pattern the waveguides before embedding them in an 8 µm thick PECVD silica annealed at 1050°C under O2 to increase the optical quality of the deposited material.…”
Section: Sin Circuits For Hybrid Lasermentioning
confidence: 99%
“…The waveguides have a width of 2.9µm in order to get single mode operation. Bragg gratings are obtained by a sidewall corrugation of the waveguide with a periodic pattern as already published by other teams [1]. Reactive Ion Etching (RIE) is used to pattern the waveguides before embedding them in an 8 µm thick PECVD silica annealed at 1050°C under O2 to increase the optical quality of the deposited material.…”
Section: Sin Circuits For Hybrid Lasermentioning
confidence: 99%
“…In 2019, Primiani et al [86] reported a WBG-ECSL with a central wavelength of 1543 nm based on the Bragg gratings and SOA produced by the silicon nitride process. By changing the bias current of the SOA, 0.16 nm was tuned continuously.…”
Section: Wbg-ecslsmentioning
confidence: 99%