Silicon nanowire temperature sensor and its characteristic

Wang, Chuan-Po; Liu, Chien-Wei; Gau, Chie

doi:10.1109/nems.2011.6017434

Cited by 18 publications

(12 citation statements)

References 8 publications

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“…In comparison with other temperature sensors such as strings and bimetallic geometries relying on optical readout [20,[28][29][30], the PEDOT:TsO nanowire only requires a 2 point electrical readout that, due to the small impedance, in principle can be read using a multimeter depending on the desired precision. Temperature measurement with nanowire structures is not a new principle and has previously been demonstrated with both PEDOT nanowires [15] and nanowires of other materials [31][32][33]. The PEDOT:TsO nanowire fabricated in this work has a much lower resistivity than the previously demonstrated nanowire devices.…”

Section: Temperature Measurementsmentioning

confidence: 80%

Fabrication and characterization of PEDOT nanowires based on self-assembled peptide nanotube lithography

Andersen

Christiansen

Castillo-León

et al. 2013

Organic Electronics

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a b s t r a c tIn this article we demonstrate the use of self-assembled peptide nanotube structures as masking material in a rapid, mild and low cost fabrication of polymerized p-toluenesulfonate doped poly(3,4-ethylenedioxythiophene) (PEDOT:TsO) nanowire device. In this new fabrication approach the PEDOT:TsO nanowire avoids all contact with any organic solvents otherwise traditionally used in clean room fabrication. This can be achieved due to the intriguing properties of the self-assembled peptide nanotubes utilized as a dry etching mask for the patterning of the PEDOT:TsO nanowire. The peptide nanotubes, despite remaining stable during the reactive ion etching procedure, can be dissolved rapidly in water afterwards. The fabricated PEDOT:TsO nanowire devices exhibit excellent electrical characteristics. Finally, the potential of PEDOT:TsO nanowires as temperature sensors has been demonstrated and the high resolution of the sensor was illustrated.

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Section: Temperature Measurementsmentioning

confidence: 80%

Fabrication and characterization of PEDOT nanowires based on self-assembled peptide nanotube lithography

Andersen

Christiansen

Castillo-León

et al. 2013

Organic Electronics

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“…The temperature and resistance of the heating film exposed to the air flow could be measured easily if the TCR is higher for the material and vice-versa. 74 For instance, the thermal sensors proposed in 75,76 provides low thermoresistive sensitivity and so sensing temperature changes is challenging. Consequently, the resistance change (∆Rh/Rh) is generally converted into voltage (∆Vh) change by a Wheatstone bridge circuit and amplified later to observe the sensor response.…”

Section: High Temperature Flow Testingmentioning

confidence: 99%

A hot-film air flow sensor for elevated temperatures

Balakrishnan

Dinh

Nguyen

et al. 2019

Review of Scientific Instruments

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We report for a novel packaging and experimental technique to characterize thermal flow sensors at high temperatures. To start with, the paper briefly presents the fabrication of 3C-SiC (silicon carbide) on a glass substrate via anodic bonding, followed by the study of thermoresistive and Joule heating effects in the 3C-SiC nano-thin film heater. A high thermal coefficient of resistance (TCR) of approximately-20,720 ppm/K at ambient temperature and-9,287 ppm/K at 200°C suggest the potential use of silicon carbide for thermal sensing applications in harsh environments. During the Joule heating test, a high temperature epoxy and a brass metal sheet were utilized to establish the electric conduction between the metal electrodes and the SiC heater inside a temperature oven. In addition, the metal wires from the sensor to external circuitry were protected by a fibre glass insulating sheath to avoid short-circuit. The Joule heating test ensured the mechanical and Ohmic contact stabilities at elevated temperatures. Using a hot-wire anemometer as reference flow sensor, calibration test was performed at 25°C, 35°C and 45°C in the oven. Finally, the SiC hot-film sensor was characterized for a range of low air flow velocity, indicating a sensitivity of 5 mm-1 s. The air flow was established by driving a metal propeller connected to a DC motor and controlled by a microcontroller. The materials, metallization and interconnects used in our flow sensor were robust and survived temperatures of around 200°C.

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“…The temperature detection during the flow could be very easy if the TCR is higher for the sensor material and vice-versa. For example, the thermal sensors proposed in [53,54] offers low thermoresistive sensitivity and so sensing temperature changes is very difficult. As a result, the relative resistance change (∆R/R) is commonly converted into voltage (∆V) change by a Wheatstone bridge circuit and amplified thereafter to observe the flow response.…”

Section: Accepted Manuscriptmentioning

confidence: 99%

Highly sensitive 3C-SiC on glass based thermal flow sensor realized using MEMS technology

Balakrishnan

Dinh

Phan

et al. 2018

Sensors and Actuators A: Physical

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Thermoresistive properties of a Cubic Silicon carbide (3C-SiC) on glass sensor are studied. The negative temperature coefficient leads to an increasing signal with increasing flow velocity.  The relationship between the geometry of the SiC heater and the sensor performance is studied. A larger heater leads to a higher sensitivity.  Influence of flow direction on the sensor performance was studied. Downstream sensor is more sensitive.  The developed SiC thermal flow sensor combines the advantages of simplicity, low power consumption, high sensitivity and full dynamic range of air flow.

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Silicon nanowire temperature sensor and its characteristic

Cited by 18 publications

References 8 publications

Fabrication and characterization of PEDOT nanowires based on self-assembled peptide nanotube lithography

Fabrication and characterization of PEDOT nanowires based on self-assembled peptide nanotube lithography

A hot-film air flow sensor for elevated temperatures

Highly sensitive 3C-SiC on glass based thermal flow sensor realized using MEMS technology

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