Silicon micromachined two-dimensional galvano optical scanner

Asada, Norihiro; Matsuki, H.; Minami, Kazuyuki; Esashi, Masayoshi

doi:10.1109/20.334177

Cited by 137 publications

(56 citation statements)

References 4 publications

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“…However, this design involves a number of problems, including nonlinearity of the scan angle with respect to the applied voltage. Electromagnetic drive [8,9] requires magnet circuits and magnets, and is inferior to other designs in terms of compactness; on the other hand, electromagnetic drive offers large forces at low voltages. Many electromagnetically driven MEMS mirrors use a Lorentz force produced by current flowing perpendicular to a magnetic field applied along the device surface.…”

Section: Introductionmentioning

confidence: 98%

Electromagnetically driven two‐axis optical beam steering MEMS mirror and its dependence of actuation on magnetic field

Watanabe

Abe

Iwamatsu

et al. 2011

Elect Comm in Japan

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SUMMARYThis paper describes the development of an electromagnetically driven two-axis MEMS mirror which steers an optical beam, and the dependence of the tilting angles on the magnet shape and size and the initial gap between planar coils and the magnet surface. A reflective Au mirror (1.8 × 1.8 mm 2 ) can be tilted bidirectionally with an electromagnetic force induced by the current of the planar coils and the magnetic field of a permanent magnet. A newly developed MEMS mirror device (10 × 10 × 0.2 mm 3 ) was set on a printed circuit board (15 × 15 × 1.0 mm 3 ), and the board was fixed on a holder in which a magnet was inset. The utilized magnets were cubic (6, 8, and 15 mm square and 5 mm thick), cylindrical (6 and 8 mm in diameter and 5 mm thick), and spherical (8 mm in diameter) to investigate efficient actuation. The initial gaps of the planar coils and magnet surface were 0, 500, 1000, and 2000 µm. The magnetic flux density and its gradient decreased with distance from the magnet surface. The tilting angles of the MEMS mirror increased with decreasing size of the square magnet and shorter distance, and were largest when using a magnet 6 mm square and a 500-µm gap, in which condition the maximum tilting angles in the X and Y directions were 2.95 and 3.68 deg/mA, respectively. In addition, we obtained 3D-OCT images of human finger tissue by using a Fourier domain fiber interferometer with a newly developed MEMS mirror.

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Section: Introductionmentioning

confidence: 98%

Electromagnetically driven two‐axis optical beam steering MEMS mirror and its dependence of actuation on magnetic field

Watanabe

Abe

Iwamatsu

et al. 2011

Elect Comm in Japan

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“…In addition, it is difficult for polygon motors to achieve scanning frequencies of several tens of thousand Hz such as those required for laser television [4]. With improvements in semiconductor processes, an actuator with a micro electromechanical system (MEMS) process is becoming practical to simultaneously realize low power and small size [2]. However, MEMS mirrors that generally use piezoelectric or static electric drives require several tens of voltage in their circuitry compared with the desired 3-5 V circuitry design in a portable device [5], [6].…”

Section: Introductionmentioning

confidence: 99%

A Novel High-Speed Electromagnetic Oscillatory Actuator With a Dual Mover for Optical Scanner Applications

Yoshida

Oyaizu

et al. 2014

IEEE Trans. Magn.

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In this paper, we propose a high-speed moving magnet-type oscillatory actuator in which a dual-mover structure is designed to reduce magnetic damping force. Both movers have independent resonant frequency, and the actuator is driven at the larger resonant frequency. The smaller mover serves as the optical scanning element and maintains large oscillation amplitude. The larger mover, with moving magnets, serves as the magnetic driving element and maintains relatively smaller amplitude because of the magnetic damping.Index Terms-Actuator with dual movers, high speed oscillation, magnetic damping, optical scanner.

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“…Using a range of fabrication methods, researchers have developed a diverse suite of actuators including electrostatic actuators [8], electromagnetic actuators [9], shape memory alloy (SMA) actuators [10,11], and piezoelectric actuators [12]. The electrostatic type is easily miniaturized but generates only a small force.…”

Section: Introductionmentioning

confidence: 99%

A Millimetre-Sized Robot Realized by a Piezoelectric Impact-Type Rotary Actuator and a Hardware Neuron Model

Takato

Tatani

Oku

et al. 2014

International Journal of Advanced Robotic Systems

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Micro-robotic systems are increasingly used in medicine and other fields requiring precision engineering. This paper proposes a piezoelectric impacttype rotary actuator and applies it to a millimetre-size robot controlled by a hardware neuron model. The rotary actuator and robot are fabricated by micro-electromechanical systems (MEMS) technology. The actuator is composed of multilayer piezoelectric elements. The rotational motion of the rotor is generated by the impact head attached to the piezoelectric element. The millimetre-size robot is fitted with six legs, three on either side of the developed actuator, and can walk on uneven surfaces like an insect. The three leg parts on each side are connected by a linking mechanism. The control system is a hardware neuron model constructed from analogue electronic circuits that mimic the behaviour of biological neurons. The output signal ports of the controller are connected to the multilayer piezoelectric element. This robot system requires no specialized software programs or A/D converters. The rotation speed of the rotary actuator reaches 60 rpm at an applied neuron frequency of 25 kHz during the walking motion. The width, length and height of the robot are 4.0, 4.6 and 3.6 mm, respectively. The motion speed is 180 mm/min.

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Silicon micromachined two-dimensional galvano optical scanner

Cited by 137 publications

References 4 publications

Electromagnetically driven two‐axis optical beam steering MEMS mirror and its dependence of actuation on magnetic field

Electromagnetically driven two‐axis optical beam steering MEMS mirror and its dependence of actuation on magnetic field

A Novel High-Speed Electromagnetic Oscillatory Actuator With a Dual Mover for Optical Scanner Applications

A Millimetre-Sized Robot Realized by a Piezoelectric Impact-Type Rotary Actuator and a Hardware Neuron Model

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