A Millimetre-Sized Robot Realized by a Piezoelectric Impact-Type Rotary Actuator and a Hardware Neuron Model

Takato, Minami; Tatani, Masaki; Oku, Hirozumi; Okane, Yuki; Tanida, Junichi; Yamasaki, S.; Saito, Ken; Uchikoba, Fumio

doi:10.5772/58671

Cited by 6 publications

(3 citation statements)

References 17 publications

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“…Moreover, the direct driving type MPRs can be further divided into the direct deformation type ones and the combing flexure hinge type ones; the stepping driving type MPRs include the inchworm driving type ones and the walking driving type ones; and the inertial driving type MPRs can be divided into the inertial impact type ones and the stick‐slip actuating type ones. [ 168 , 169 , 170 ]…”

Section: Mprs With Different Working Principlesmentioning

confidence: 99%

Developments and Challenges of Miniature Piezoelectric Robots: A Review

Li,

Deng,

Zhang

et al. 2023

Advanced Science

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Miniature robots have been widely studied and applied in the fields of search and rescue, reconnaissance, micromanipulation, and even the interior of the human body benefiting from their highlight features of small size, light weight, and agile movement. With the development of new smart materials, many functional actuating elements have been proposed to construct miniature robots. Compared with other actuating elements, piezoelectric actuating elements have the advantages of compact structure, high power density, fast response, high resolution, and no electromagnetic interference, which make them greatly suitable for actuating miniature robots, and capture the attentions and favor of numerous scholars. In this paper, a comprehensive review of recent developments in miniature piezoelectric robots (MPRs) is provided. The MPRs are classified and summarized in detail from three aspects of operating environment, structure of piezoelectric actuating element, and working principle. In addition, new manufacturing methods and piezoelectric materials in MPRs, as well as the application situations, are sorted out and outlined. Finally, the challenges and future trends of MPRs are evaluated and discussed. It is hoped that this review will be of great assistance for determining appropriate designs and guiding future developments of MPRs, and provide a destination board to the researchers interested in MPRs.

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Section: Mprs With Different Working Principlesmentioning

confidence: 99%

Developments and Challenges of Miniature Piezoelectric Robots: A Review

Li,

Deng,

Zhang

et al. 2023

Advanced Science

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show abstract

“…energy to mechanical energy. As a kind of micro-driver, piezoelectric motors are widely used in fields requiring precise positioning and driving, such as semiconductor manufacturing [1], precise measurement [2], biomedicine [3] and other fields.…”

Section: Introductionmentioning

confidence: 99%

Bipedal driven inertial type piezoelectric motor working under quasi-static and resonant states

Qing

Mingfei

Han

et al. 2023

Smart Mater. Struct.

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An inertia piezoelectric motor based on bipedal driven, which can work in not only quasi-static but also resonant states, is proposed, designed, fabricated and studied considering the high resolution of quasi-static piezoelectric motor and the high speed of resonant piezoelectric motor. The two stators of the piezoelectric motor are drived by two sinusoidal electrical signals with 1:2 frequency ratio to generate sinusoidal vibration on the corresponding driving foot. A continuous step motion without frequency limitation is realised under the action of inertia and friction forces after synthesising the sinusoidal vibration of different frequencies into mechanical sawtooth vibration. The natural resonant frequencies of the piezoelectric motor are adjusted to a specific proportion to combine the vibrations in the resonant state through finite element analysis. In the structure of two stators, each stator has a corresponding inertia block, and the corresponding resonant frequency can be altered by adjusting the mass of the inertial block without affecting the other resonant frequency, thus markedly simplifying the design difficulty of the piezoelectric motor which can work in quasi-static and resonant states. The motion characteristics of the prototype are tested by building the prototype and experimental platform. Experimental results show that the maximum speed of the prototype is 29.3 mm/s and the maximum load is 200 g in the resonant state, the minimum displacement resolution of prototype motor is 0.26 μm in the quasi-static state. The motion characteristics of the prototype are consistent with the theoretical analysis, which provides an effective idea to improve the comprehensive performance of the piezoelectric motor.

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“…With the development of micromotors, piezoelectric motors have been widely used in tasks that require precise positioning and driving, such as the mask stage of lithography machine [1], the positioning stage of microscopy systems [2], zoom lens * Author to whom any correspondence should be addressed. system [3], micro-robots [4] and so on. Piezoelectric motors use the inverse piezoelectric effect of piezoelectric materials to realise the conversion of electrical energy to mechanical energy [5][6][7][8].…”

Section: Introductionmentioning

confidence: 99%

Design, simulation, and motion characteristics of a novel impact piezoelectric actuator using double stators

Qing¹,

Mingfei²,

Wang³

et al. 2022

Smart Mater. Struct.

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This study presents a novel impact piezoelectric motor that excites double stators through a sinusoidal signal. A sawtooth signal drives the traditional impact piezoelectric actuator, and its working frequency is limited by the resonant frequency. This study uses sine signals to drive the double stators to produce a sinusoidal vibration. The sinusoidal vibration of different frequencies and amplitudes are synthesised into a sawtooth vibration on the stage plate. The directional movement of the slider is realised using the vibration of the stage plate to drive the slider. This structure reduces the space required for the piezoelectric actuator to work. The working principle of the motor is discussed, and the structure is constructed. The dynamics model of the whole system is established on the based of the dynamics model of the actuator and the LuGre friction model. Moreover, the dynamics model was simulated and analysed through MATLAB/Simulink. The prototype is fabricated and tested. Experimental results confirm the effectiveness of using sinusoidal signals to drive the piezoelectric actuator, and the motion process of the piezoelectric motor is consistent with the theoretical analysis. The maximum speed of the piezoelectric actuator is 5.54 mm/s, and the resolution is 0.72 μm. This study provides an effective driving method for the quasi-static piezoelectric motor to improve the working frequency.

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A Millimetre-Sized Robot Realized by a Piezoelectric Impact-Type Rotary Actuator and a Hardware Neuron Model

Cited by 6 publications

References 17 publications

Developments and Challenges of Miniature Piezoelectric Robots: A Review

Developments and Challenges of Miniature Piezoelectric Robots: A Review

Bipedal driven inertial type piezoelectric motor working under quasi-static and resonant states

Design, simulation, and motion characteristics of a novel impact piezoelectric actuator using double stators

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