Silicon micro optical switching device with an electromagnetically operated cantilever

Matsuura, T.; Fukami, T.; Chabloz, M.; Sakai, Yuichi; Izuo, Shinichi; Uemura, A.; Kaneko, S.; Tsutsumi, Kazuhiko; Hamanaka, Koichi

doi:10.1016/s0924-4247(99)00387-8

Cited by 19 publications

(7 citation statements)

References 2 publications

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“…[9] analyzed thermoelastic damping (TED) effects in laminated/composite microcantilevers. These examples of models facilitated development of microcantilevers that are used as mechanical elements in MEMS‐based devices for chemical and biological sensors [10–12], optical switches [13], microactuators [14], atomic force microscopes [15, 16], and data storage devices [17–19], just to name a few representative applications.…”

Section: Methodsmentioning

confidence: 99%

Experimental Determination of the Q‐factors of Microcantilevers Coated With Thin Metal Films

Klempner

Marinis

Hefti

et al. 2009

Strain

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Microelectromechanical systems (MEMS) are typically fabricated out of materials that are mechanically sound at the microscale, but can be relatively poor electrical conductors. For this reason, areas of MEMS can be coated with various thin metal films to provide electrical pathways. These films, however, may drastically alter mechanical properties of the device. In this paper we investigate how metallization of microcantilevers affects the quality factors, (Q). Using two sets of silicon microcantilevers that are coated with aluminium films from 5 nm to 30 nm thick, on one side and two sides, respectively, the Q-factors are experimentally determined using the ring-down method. The ring-down method entails mechanically exciting the microcantilevers at their fundamental resonance frequency, abruptly stopping the excitation, and then measuring the decay of oscillation amplitude as a function of time. From this ring-down curve, the Q-factor of each microcantilever can be determined. Results show that the greater the thickness of the aluminium film, the lower the Q-factor will be. We also show a significant temperature dependency of the Q-factor of aluminium coated microcantilevers.

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Section: Methodsmentioning

confidence: 99%

Experimental Determination of the Q‐factors of Microcantilevers Coated With Thin Metal Films

Klempner

Marinis

Hefti

et al. 2009

Strain

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“…Until recently, assembling of commercial magnets [1]- [3] or screen-printing of magnetic particles [4], [5] has been suggested as a way of fabricating thick permanent magnet structures on Manuscript received December 21, 2000; revised July 17, 2001. This work was supported in part by NASA-Glenn Microsystem Initiative (156264-N003327).…”

Section: Introductionmentioning

confidence: 99%

A bidirectional magnetic microactuator using electroplated permanent magnet arrays

Cho

Ahn

2002

J. Microelectromech. Syst.

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A novel bidirectional magnetic microactuator using electroplated permanent magnet arrays has been designed, fabricated and characterized in this work. To realize a bidirectional microactuator, CoNiMnP-based permanent magnet arrays have been fabricated first on a silicon cantilever beam using a new electroplating technique. In the fabricated permanent magnets, the vertical coercivity and retentivity have been achieved up to 87.6 kA/m (1100 Oe) and 190 mT (1900 G), respectively by applying magnetic field during electroplating. A prototype bidirectional magnetic microactuator has been realized by integrating an electromagnet with a silicon cantilever beam, which has permanent magnet arrays on its tip. By applying a dc current of 100 mA and altering its polarity, bidirectional motion on the tip of the cantilever beam has been successfully achieved in the deflection range of 80 m.[656]Index Terms-Bidirectional actuator, electroplated magnet, magnetic microactuator, permanent magnet array.

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“…The digital principle is used in several applications where a mobile part is displaced between two discrete positions. The main application is optical [9], electrical [10] or fluidic [11], [12] switches. The mobile part is displaced between the open (ON) and closed (OFF) positions.…”

Section: Introductionmentioning

confidence: 99%

“…To realize a digital actuator, various physical principles are used [9]- [13], [20]- [24]. Electromagnetic actuation is well adapted because the holding effect could be easily obtained magnetically with Permanent Magnets (PMs).…”

Section: Introductionmentioning

confidence: 99%

A Four-Discrete-Position Electromagnetic Actuator: Modeling and Experimentation

Petit

Prelle

Dore

et al. 2010

IEEE/ASME Trans. Mechatron.

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In this article, an electromagnetic actuator having four discrete positions is discussed. The principle, the modelling and an experimental device of this actuator are presented in this study. This actuator is composed of a mobile permanent magnet, four fixed permanent magnets, which ensure the holding of the discrete positions, and two perpendicular wires to switch independently in two perpendicular directions. The mobile part has four discrete positions, two in each direction. An electromagnetic actuator modelling has been realized to compute the magnetic and electromagnetic forces exerted on the mobile magnet and its displacement. The experimental device was designed using this model and then manufactured. The stroke of the mobile part is 1 × 1 mm. The driving current ranges from 3 A to 7 A. A comparison between experimental and modelled results is carried out. A good agreement on the displacement curves and on the rise times are observed for all the range of controlling currents.

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Silicon micro optical switching device with an electromagnetically operated cantilever

Cited by 19 publications

References 2 publications

Experimental Determination of the Q‐factors of Microcantilevers Coated With Thin Metal Films

Experimental Determination of the Q‐factors of Microcantilevers Coated With Thin Metal Films

A bidirectional magnetic microactuator using electroplated permanent magnet arrays

A Four-Discrete-Position Electromagnetic Actuator: Modeling and Experimentation

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