A bidirectional magnetic microactuator using electroplated permanent magnet arrays

Cho, H.J.; Ahn, Chong H.

doi:10.1109/84.982866

Cited by 99 publications

(74 citation statements)

References 14 publications

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“…A bidirectional cantilever magnetic actuator was developed in [23]. In this design, an array of permanent magnets are electroplated at the tip of a silicon cantilever beam in order to produce vertical actuation.…”

Section: Electromagnetic Actuatorsmentioning

confidence: 99%

Development of a MEMS repulsive actuator for large out-of-plane force

Khan¹,

Mrad²

2014

J. Micromech. Microeng.

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This thesis describes the development of a MEMS repulsive actuator capable of producing a large out-of-plane force. Existing MEMS repulsive actuators are low out-of-plane force actuators that are unable to support or lift a mass of 1 mg. A high force MEMS repulsive actuator was developed to overcome this limitation. The design was optimized employing parameters of the actuator's fingers to increase the out-of-plane force. A design was developed based on the analytical results derived from extending the mathematical model of an existing actuator. A commercial manufacturing process, PolyMUMPs, was used to fabricate a prototype which was tested to validate the analytical and computational results. The prototype achieved an out-of-plane displacement of 15 µm and a 0.2° angular rotation. The resonance frequency was 120 Hz, and the rise and fall times were measured as 14.5 ms and 3625 ms (3.6 sec), respectively. The estimated out-of-plane force is 40 µN.iii ACKNOWLEDGEMENT

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Section: Electromagnetic Actuatorsmentioning

confidence: 99%

Development of a MEMS repulsive actuator for large out-of-plane force

Khan¹,

Mrad²

2014

J. Micromech. Microeng.

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“…[10][11][12] In addition, the currently widely used unidirectional electromagnet cannot satisfy the multifunction requirements. The existing bidirectional hybrid electromagnets are often used for precision manufacturing and measuring system [13][14][15][16] and not for highpower equipment.…”

Section: Introductionmentioning

confidence: 99%

A novel bidirectional and dual-redundancy hybrid electromagnetic brake for aircraft

Chen

Gao

Zhang

2016

Advances in Mechanical Engineering

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This article presents a novel bidirectional and dual-redundancy hybrid electromagnetic brake with strong retention force and high reliability. The electromagnetic brake with two large working air gaps consists of two stationary components and a movable component which is fixed to the shaft. The stationary components are composed of iron cores, yokes, and two sets of coil windings in which one set of redundant ones can improve reliability. The movable component consists of a permanent magnet ring and yokes. When the power is outage, the permanent magnet can provide a constant retention force to keep the movable component park at end position. When the power is on, the working magnetic fluxes of the hybrid electromagnetic brake are generated by both the permanent magnet and the coil windings carrying DC forward or reverse current. The magnetic fluxes produced by coil windings control the movement direction of the movable component to realize braking or unlocking. First, the constraint conditions of magnetomotive force to ensure bidirectional movements were deduced using the equivalent magnetic circuit method. Then, the magnetic flux density and the electromagnetic forces were calculated by the finite element method. Simulation results validated the theoretical analysis and the reasonable design. This electromagnet can be used for the electrical brake not only in the more electric aircraft but also in other applications.

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“…There are several possibilities to integrate hard magnetic components into micromotors: hybrid integration of permanent magnets [21], electroplating of hard magnetic materials [22], and polymer magnets, in which micro particles of hard magnetic materials are suspended in a polymer matrix [23]. In our work, we used both commercially available bulk magnets and polymer magnets.…”

Section: Fabrication Technologiesmentioning

confidence: 99%

Electromagnetic Micromotors—Design, Fabrication and Applications

Büttgenbach

2014

Micromachines

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Abstract:Microactuators have become essential elements of microelectromechanical systems, for example, for positioning purposes and for fluid-handling tasks in microfluidic systems. UV depth lithography and other new micromachining technologies, which have been developed since the 1990s, have initiated extensive investigations of electromagnetic microactuators, which are characterized by high forces, large deflections, low driving voltages resulting from low input impedances and robustness under harsh environments. This paper reviews the comprehensive research on the design, fabrication and application of electromagnetic micromotors performed in our laboratory over the past years.

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A bidirectional magnetic microactuator using electroplated permanent magnet arrays

Cited by 99 publications

References 14 publications

Development of a MEMS repulsive actuator for large out-of-plane force

Development of a MEMS repulsive actuator for large out-of-plane force

A novel bidirectional and dual-redundancy hybrid electromagnetic brake for aircraft

Electromagnetic Micromotors—Design, Fabrication and Applications

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